“…1 GaN has been successfully utilized for fast chargers and in 5G communication technologies as a high-power amplifier. 2,3 In comparison with WBG materials, b-Ga 2 O 3 , a UWBG material, has a larger bandgap range (4.7-4.9 eV) and theoretically higher breakdown fields (B8 MV cm À1 ). 4 b-Ga 2 O 3 exhibits an exceptionally high Baliga's figure-of-merit (BV 2 /R ON )-which is the performance indicator related to conduction loss-which is equal to 3214, surpassing those of Si (1), SiC (317), and GaN (846).…”