1996
DOI: 10.1016/s0065-3055(08)60535-3
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A Review of Group 2 (Ca, Sr, Ba) Metal-Organic Compounds as Precursors for Chemical Vapor Deposition

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Cited by 89 publications
(97 citation statements)
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“…[36] In general, cyclopentadienyls of strontium and barium have been considered too air and moisture sensitive to be useful in CVD and thus their use has been only briefly reported. [8,16,37] Our experiments showed that, with careful handling, they may be used without difficulty in ALD. In this work, we have performed a detailed study on the ALD growth of SrTiO 3 by using strontium bis(tri-isopropylcyclopentadienyl) (Sr(C 5 i Pr 3 H 2 ) 2 ) as the novel strontium precursor, and…”
Section: Introductionmentioning
confidence: 80%
“…[36] In general, cyclopentadienyls of strontium and barium have been considered too air and moisture sensitive to be useful in CVD and thus their use has been only briefly reported. [8,16,37] Our experiments showed that, with careful handling, they may be used without difficulty in ALD. In this work, we have performed a detailed study on the ALD growth of SrTiO 3 by using strontium bis(tri-isopropylcyclopentadienyl) (Sr(C 5 i Pr 3 H 2 ) 2 ) as the novel strontium precursor, and…”
Section: Introductionmentioning
confidence: 80%
“…Some complex structures stated have thermochromic, solvatochromic and ionochromic properties depending on deaquation [12]. Also, the alkaline earth metal cation complexes with organic ligands were studied and investigated their bonding parameters by lots of researcher [13][14][15][16][17][18] The importance of studies related with transition metal complexes of nicotinamide acting as vitamin B 3 and used in drug preparation has been increased recently. As a result of spectral investigation of complexes between nicotinamide and these metals, it was determined that it has ability to bind as monodentate ligand through pyridine nitrogen.…”
Section: Introductionmentioning
confidence: 99%
“…Most commonly these ligands are associated with transition metals; however, cyclopentadienyl compounds of main group metal and metalloid elements have also received considerable attention for their diverse and unusual structures and their fluxional behavior [1][2][3][4][5]. These compounds are also of interest as potential precursors in metal-organic chemical vapor deposition (MOCVD) [3], as ligands for transition metals [4], as synthetic precursors to organometallic complexes [5], in catalysis [6], and as molecular precursors to materials [7].…”
Section: Introductionmentioning
confidence: 99%