A review of microelectromechanical systems for nanoscale mechanical characterization

Zhu, Yong; Chang, Tzu-Hsuan

doi:10.1088/0960-1317/25/9/093001

Cited by 64 publications

(33 citation statements)

References 157 publications

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“…There has been extensive interest in the past decade in developing MEMS-based stage for in situ SEM/ TEM testing of nanostructures [49]. More details on MEMSbased nanomechanical testing have been reviewed elsewhere [117,118]. In this review, only a brief summary of the major advances in this area will be given.…”

Section: Mems-based Testing Methods It Is Worth Discussing Mems-basementioning

confidence: 99%

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Mechanics of Crystalline Nanowires: An Experimental Perspective

Zhu

2017

Applied Mechanics Reviews

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A wide variety of crystalline nanowires (NWs) with outstanding mechanical properties have recently emerged. Measuring their mechanical properties and understanding their deformation mechanisms are of important relevance to many of their device applications. On the other hand, such crystalline NWs can provide an unprecedented platform for probing mechanics at the nanoscale. While challenging, the field of experimental mechanics of crystalline nanowires has emerged and seen exciting progress in the past decade. This review summarizes recent advances in this field, focusing on major experimental methods using atomic force microscope (AFM) and electron microscopes and key results on mechanics of crystalline nanowires learned from such experimental studies. Advances in several selected topics are discussed including elasticity, fracture, plasticity, and anelasticity. Finally, this review surveys some applications of crystalline nanowires such as flexible and stretchable electronics, nanocomposites, nanoelectromechanical systems (NEMS), energy harvesting and storage, and strain engineering, where mechanics plays a key role.

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Section: Mems-based Testing Methods It Is Worth Discussing Mems-basementioning

confidence: 99%

“…Also, compliance of the adhesives is of potential concern. More details on the sample preparation can be found elsewhere [57,118,143].…”

Section: Sample Preparationmentioning

confidence: 99%

Mechanics of Crystalline Nanowires: An Experimental Perspective

Zhu

2017

Applied Mechanics Reviews

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“…For the mechanical characterization of micro/nano-samples, MEMS-based tensile testing devices were shown to be very powerful tools (Zhu and Chang, 2015). In fact, because of their unique compatibility with scanning/transmission electron microscopes (SEM/TEM), they allow tests to be performed under real-time imaging of the sample deformation.…”

Section: Introductionmentioning

confidence: 99%

Load Sensor Instability and Optimization of MEMS-based Tensile Testing Devices

et al. 2019

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MEMS-based tensile testing platforms are very powerful tools for the mechanical characterization of nanoscale materials, as they allow for testing of micro/nano-sized components in situ electron microscopes. In a typical configuration, they consist of an actuator, to deliver force/displacement, and a load sensor, which is connected to the sample like springs in series. Such configuration, while providing a high resolution force measurement, can cause the onset of instability phenomena, which can later compromise the test validity. In the present paper such phenomena are quantitatively discussed through the development of an analytical model, which allows to find a relationship between the rise of instability and the sensor stiffness, which is the key parameter to be optimized.

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“…For the characterization of micro-machined materials, where due to size effects mechanical properties often differ significantly from those at macro scale, test systems have been developed that perform material testing (tensile and bending test) on micron-size samples [ 18 , 19 , 20 , 21 ]. Apart from material testing, it is important to study the deformation of the interconnect structure itself, as it would be loaded in the actual application, before fabricating the whole device.…”

Section: Introductionmentioning

confidence: 99%

A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

et al. 2018

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A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in high-density, highly stretchable electronic circuits. For an easy, damage-free handling and mounting of these free-standing structures, the device is designed to be fabricated as a single chip/unit that is separated into two independently movable parts after it is fixed in the tensile test stage. Furthermore, the fabrication method allows for test structures of different geometries to be easily fabricated on the same substrate. The utility of the device has been demonstrated by stretching the free-standing interconnect structures in excess of 1000% while simultaneously measuring their electrical resistance. Important design considerations and encountered processing challenges and their solutions are discussed in this paper.

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A review of microelectromechanical systems for nanoscale mechanical characterization

Cited by 64 publications

References 157 publications

Mechanics of Crystalline Nanowires: An Experimental Perspective

Mechanics of Crystalline Nanowires: An Experimental Perspective

Load Sensor Instability and Optimization of MEMS-based Tensile Testing Devices

A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

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