2002
DOI: 10.1016/s1044-5803(02)00192-4
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A review of nanoindentation continuous stiffness measurement technique and its applications

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Cited by 1,356 publications
(703 citation statements)
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“…Nanoindentation [1], which is relatively simple and effective, has already been used as a standard technique for evaluating mechanical properties of thin films [2][3][4][5][6][7]. Recently, a number of relevant scientists have focused on thin films with defects through simulations and experiment [8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…Nanoindentation [1], which is relatively simple and effective, has already been used as a standard technique for evaluating mechanical properties of thin films [2][3][4][5][6][7]. Recently, a number of relevant scientists have focused on thin films with defects through simulations and experiment [8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…A Berkovich diamond indenter was selected [131]. In the CSM module, continuous loading and unloading cycles were conducted during the loading branch by imposing a small dynamic oscillation of 2 nm and 45 Hz on the displacement signal and measuring the amplitude and phase of the corresponding force [97]. Consequently, the contact stiffness can be measured continuously during the penetration depth.…”
Section: Methodsmentioning
confidence: 99%
“…Depth sensing indentations tests (DSI) were carried out with a Nanoindenter XP (MTS systems Co.), on the polished surfaces of the samples, by using the continuous stiffness measurement methodology (CSM) [97]. Continuous loading and unloading cycles were conducted during the loading branch by imposing a small dynamic oscillation of 2 nm and 45…”
Section: Methodsmentioning
confidence: 99%
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