In the recent studies, the effects of different metal oxide nanoparticles addition in different dielectrics of EDM process has been thoroughly investigated, showing that adding the nanoparticles improves the material removal rate and surface roughness. The results illustrate that the parameters such as density, particle size, particle concentration, and electrical and thermal conductivity of the nanoparticles can affect the process performance. Compared to the other metal oxides, ZnO has lower thermal and higher electrical resistance which makes it distinct from other nanoparticles used in EDM process in terms of physical properties. In this paper, the effects of the variation of peak current,and ZnO particle mass on MRR, surface roughness, and thermal conductivity of AISI1045، AISI4140, and AISID3 in EDM process are investigated. The results illustrate that 4 grams of the ZnO nanoparticle mass increase the MRR up to 10.71%, 50%, and 45.55%, for rough machining of AISI1045, AISI4140, and AISID3, respectively. In finish machining, they show that the surface roughness can be improved 16.66%, 29.41%, and 56.25%, respectively. It is observed that the amount of deposited particles on AISID3 is maximum followed by AISI 1045 and AISI4140. Therefore, in AISID3 both significant improvement of surface roughness and ZnO deposition can be achieved.