A review of terahertz metamaterial sensors and their applications

Wang, Weijin; Sun, Kaixiang; Xue, Ying; Lin, Jie; Fang, Jiukai; Shi, Shengnan; Zhang, Shan; Shi, Yanpeng

doi:10.1016/j.optcom.2024.130266

Optics Communications

2024

DOI: 10.1016/j.optcom.2024.130266

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A review of terahertz metamaterial sensors and their applications

Weijin Wang,

Kaixiang Sun,

Ying Xue

et al.

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Cited by 7 publications

References 94 publications

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Terahertz Radiation Detectors Using CMOS Compatible SOI Substrates

Hasan,

Khan,

Shahzadi

et al. 2024

Adv Funct Materials

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In recent years, silicon‐based room temperature Terahertz (THz) detectors have become the most optimistic research area because of their high speed, low cost, and unimpeded compatibility with mainstream complementary metal‐oxide‐semiconductor (CMOS) device technologies. However, Silicon (Si) suffers from low responsivity and high noise at THz frequencies. In this review, the recent advances in Si‐based THz detectors using silicon‐on‐insulator (SOI) substrates are presented. These offer several advantages over bulk counterparts, such as reduced parasitic capacitance, enhanced electric field confinement, and improved thermal isolation. The different types of THz detectors exploiting SOI substrate, such as conventional metal‐oxide‐semiconductor field effect transistors (MOSFETs), junction‐less MOSFETs, junction‐less nanowires field effect transistors (JLNWFETs), micro‐electromechanical system (MEMS), metal‐semiconductor‐metal (MSM) structures, and single electron transistor (SET), are discussed, and their key performances in terms of responsivity, noise equivalent power (NEP), bandwidth, and dynamic range are compared. The challenges and opportunities for further improvement of SOI THz detectors, such as device scaling, integration, and modulation, are also highlighted. This review may offer compelling evidence supporting the idea that SOI THz detectors have the potential to facilitate high performance, low power consumption, and scalability—qualities essential for advancing next‐level technologies.

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Terahertz Radiation Detectors Using CMOS Compatible SOI Substrates

Hasan,

Khan,

Shahzadi

et al. 2024

Adv Funct Materials

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Terahertz Metamaterial Sensors: Design Theory, Optimization Approach, and Advancements in Biosensing Applications

Cao,

Jia,

Meng

et al. 2024

Adv Materials Technologies

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Metamaterials (MMs), distinguished by their unique electromagnetic properties, offer significant advantages in the realm of terahertz (THz) biosensing and early disease diagnosis. The intense electric field confined within subwavelength volumes in metallic MMs enhances the interaction between light and analytes. The Q‐factor, sensitivity and figure of merit (FOM) are three critical direct parameters for quantitative evaluation of sensor performance. Researchers are pursuing enhancement of these parameters by optimal design of MMs structures and dimensions as well as proper choice of materials. Recently, dielectric perturbation theory is quantitatively calculated and successfully utilized in the design and optimization of THz MMs sensors. Guided by this theory, this review focuses on the design principle of THz MMs sensors, the various study on how to improve the fundamental parameters of THz MMs sensors, the specific application in biosensing including the functionalization process, and the fabrication of THz MMs sensors. Based on these methods and results, the future development of THz sensors is finally presented in a perspective view.

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Non-contact multi-channel terahertz refractive index detecting via focused orbital angular momentum

Feng,

Meng,

Liu

et al. 2025

Optics and Lasers in Engineering

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A review of terahertz metamaterial sensors and their applications

Cited by 7 publications

References 94 publications

Terahertz Radiation Detectors Using CMOS Compatible SOI Substrates

Terahertz Radiation Detectors Using CMOS Compatible SOI Substrates

Terahertz Metamaterial Sensors: Design Theory, Optimization Approach, and Advancements in Biosensing Applications

Non-contact multi-channel terahertz refractive index detecting via focused orbital angular momentum

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