1992
DOI: 10.1016/0040-6090(92)90494-v
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A review of the electrical characteristics of metal contacts on diamond

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Cited by 65 publications
(24 citation statements)
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“…III) Sputtered electrodes: a third method is to sputter metals (Ti, Al, Ta, etc) to form ohmic contacts directly on the diamond culet. This technology has been proven to be robust and has worked since the pioneering works of Das [123], Evan [124], and Werner [125]. In practice the electrodes are made with the aid of a mask with fourth slits which cover the diamond culet.…”
Section: Gasket Preparationmentioning
confidence: 99%
“…III) Sputtered electrodes: a third method is to sputter metals (Ti, Al, Ta, etc) to form ohmic contacts directly on the diamond culet. This technology has been proven to be robust and has worked since the pioneering works of Das [123], Evan [124], and Werner [125]. In practice the electrodes are made with the aid of a mask with fourth slits which cover the diamond culet.…”
Section: Gasket Preparationmentioning
confidence: 99%
“…The first method, leading to a structure we refer to here as "TFT1" was fabricated by depositing drain and source contacts directly onto the H-terminated diamond surface before any chemical modification. Drain/source ohmic contacts [21] and the metal interconnects were then patterned using standard ultraviolet photolithography procedures. Drain/source contacts, consisting of 20 nm Ti and 40 nm Au, were deposited by ebeam evaporation.…”
Section: Fabrication Of Chemically Modified Diamond Tft Devicesmentioning
confidence: 99%
“…Moreover, we showed that it was possible to directly detect the changes in charge distribution associated with surface binding events via impedance measurements [19] and in field effect devices [8,21].…”
Section: Introductionmentioning
confidence: 98%
“…[1][2][3][4][5][6][7] Research conducted on TMcoated diamond surfaces suggests that a significant reduction in electron affinity is achievable, [8][9][10][11][12][13] facilitating the use of diamond for cold cathode electron emission applications, 14,15 including the realization of thermotunnel devices. 16 To fully understand the characteristics of TM-diamond interfaces, detailed knowledge of the electronic and structural properties is necessary, for which quantum-chemical simulations are well placed to provide both qualitative and quantitative data.…”
Section: Introductionmentioning
confidence: 99%