A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Wang, Jiujiang; Liu, Xin; Yu, Yuanyu; Li, Yao; Cheng, Ching-Hsiang; Zhang, Shuang; Mak, Peng Un; Vai, Mang-I; Pun, Sio Hang

doi:10.3390/mi12060714

Cited by 6 publications

(5 citation statements)

References 63 publications

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“…However, if the DC bias voltage is increased beyond a certain value, the diaphragm collapses onto the bottom electrode, i.e. the displacement of the top electrode can result in an increase in the electric field to the point where the attractive electrostatic force overcomes the diaphragm stiffening force [32]. The critical bias voltage for which the collapse phenomenon occurs, known as pull-in voltage, is…”

Section: B Cmutmentioning

confidence: 99%

“…Although conventionally the collapse mode is avoided, as it suffers from non-linearities, it can be beneficial since it allows achieving higher output pressure and electromechanical coupling efficiency with respect to the conventional mode [32].…”

Section: B Cmutmentioning

confidence: 99%

“…There are different variations of collapse mode: traditional collapse mode, collapse snap-back mode and deep collapse mode [32]. In traditional collapse mode the central part of the diaphragm is in contact with the substrate, in collapse snapback mode the CMUT is first set in collapse state and then the membrane is allowed to lose contact with the substrate by adjusting the applied voltage, whereas in deep collapse mode the applied AC voltage is larger than the collapse voltage.…”

Section: B Cmutmentioning

confidence: 99%

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PMUT and CMUT Devices for Biomedical Applications: A Review

Moisello,

Novaresi,

Sarkar

et al. 2024

IEEE Access

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Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent years, both in terms of performance and scope of applications within the biomedical ultrasound domain. This paper presents a review of the state-of-the-art of PMUT and CMUT technologies, focusing on their principle of operation, microfabrication techniques and use in different biomedical imaging and therapeutic applications. The advantages and drawbacks of PMUT and CMUT technologies in comparison with conventional bulk transducers are highlighted, the trade-offs among PMUTs and CMUTs are discussed, and their relevance in the current landscape of medical diagnostics and therapeutic uses is outlined, thus providing a clear overview of these promising technologies for the present and the next generation biomedical ultrasound applications.

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Section: B Cmutmentioning

confidence: 99%

Section: B Cmutmentioning

confidence: 99%

Section: B Cmutmentioning

confidence: 99%

See 1 more Smart Citation

PMUT and CMUT Devices for Biomedical Applications: A Review

Moisello,

Novaresi,

Sarkar

et al. 2024

IEEE Access

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show abstract

“…The inherent manufacturing challenges with stacked arrays have inspired developers to investigate micro-electromechanical systems (MEMS)-based devices, such as capacitive micromachined ultrasound transducers (CMUTs) and piezoelectric micromachined ultrasound transducers (PMUTs). These microfabrication techniques enable the monolithic integration of each designed sub-array with different frequency bands [13][14][15] and unique exural vibration of the membranes, instigating studies on realizing multi-frequency ultrasound operation based on uniform element transducer arrays [16][17][18] . In MUTs, a wellknown approach for achieving multi-frequency ultrasound is excitation at their fundamental and harmonic modes [19][20][21][22] .…”

Section: Introductionmentioning

confidence: 99%

Dual-frequency piezoelectric micromachined ultrasound transducer based on polarization switching in ferroelectric thin film

Lee

Park

Jung

et al. 2023

Preprint

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Dual-frequency ultrasound has advantages over conventional ultrasound, which operates at a specific frequency band, due to its additional frequency response. Moreover, a tunable frequency from a single transducer enables sonographers to achieve ultrasound images with a large detection area and high resolution. This facilitates the availability of more advanced techniques that require low- and high frequency ultrasound simultaneously such as harmonic imaging and image-guided therapy. In this article, we present a novel method for dual-frequency ultrasound generation from a ferroelectric piezoelectric micromachined ultrasound transducer (PMUT). Uniformly designed transducer arrays can be used for both deep low-resolution imaging and shallow high-resolution imaging. To switch the ultrasound frequency, the only requirement is to tune a DC bias for controlling the polarization state of the ferroelectric film. Flextensional vibration of the PMUT’s membrane strongly depends on the polarization state, producing low- and high-frequency ultrasound from a single excitation frequency. This strategy for dual-frequency ultrasound dispenses with the requirement for either multi-electrode configurations or hetero-designed elements, which are integrated into an array. Consequently, this technique significantly reduces the design complexity of transducer arrays and their associated driving circuits.

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“…This force drives the vibration of the membrane, in turn producing an acoustic wave at the same frequency as that of the AC signal [ 2 ]. A regular CMUT cell consists of a membrane (top electrode), an air or vacuum gap, and a bottom electrode, as shown in Figure 1 [ 7 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications

2022

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Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topologies on the displacement, resonant frequency, and output pressure of the CMUT membrane is investigated in the transmission mode in an air environment. A novel structural-support feature, the rocker stem, is introduced, where the membrane is weakly held to the substrate in order to minimize mechanical constraints. Four different CMUT topologies are designed and assessed to analyze the impacts of topological variations. A new CMUT array configuration is also designed to provide an approach for maximizing CMUT density. This study aims to contribute to efficient CMUT design and the determination of optimum structural parameters for portable applications in air.

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A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Cited by 6 publications

References 63 publications

PMUT and CMUT Devices for Biomedical Applications: A Review

PMUT and CMUT Devices for Biomedical Applications: A Review

Dual-frequency piezoelectric micromachined ultrasound transducer based on polarization switching in ferroelectric thin film

Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications

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