A Review on Control Strategies of Batch Processing Machines in Semiconductor Manufacturing

Koo, Pyung-Hoi; Moon, Dug Hee

doi:10.3182/20130619-3-ru-3018.00203

Cited by 12 publications

(6 citation statements)

References 42 publications

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“…The due-date for each product is set based on the interarrival time by using this equation: j d  arrival time + T×U [0,4]. The model simulates multiple-product type single-machine environment with maximum BPM capacity of 6 units and processing time is set to be constant for all product types at 60 time units.…”

Section: Experimental Results and Analysismentioning

confidence: 99%

“…When a product arrives at the BPM and finds at least one BPM idle, the decision on whether the job family including the new product is loaded immediately should be made. Koo and Moon [4] classify real-time batching strategies of BPMs into two policies, threshold policy and look-ahead policy, according to the use of knowledge on future arrivals of products.…”

Section: Problem Description and Previous Workmentioning

confidence: 99%

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A Batching Strategy for Batch Processing Machine with Multiple Product Types

Mansoer¹,

Koo²

2014

JIII

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This paper presents a dynamic batching heuristic for controlling batch processing machine in semiconductor manufacturing. The batch processing machines process several jobs, at the same time, as a batch. When a batch process machine complete its task and ready to start new process, real-time loading strategies should be made to check whether it is best to start the process right away with current products in queue, or to wait for the upcoming products. A new real-time batching heuristic is proposed in multiple-product type single-machine environment with tardiness minimization as a key performance measure. Look-ahead information about future job arrivals is incorporated in decision making. Simulation experiments show that the new batching strategy provides performance of good quality. 

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Section: Experimental Results and Analysismentioning

confidence: 99%

Section: Problem Description and Previous Workmentioning

confidence: 99%

A Batching Strategy for Batch Processing Machine with Multiple Product Types

Mansoer¹,

Koo²

2014

JIII

Self Cite

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“…The NACHM (NACH with multiple processors) is an extended version of NACH for a BP station with parallel batch processors [5]. Extensive review work on BP control problems with real-time job arrival data is carried out in References [15,16]. Even though BP control decisions with real-time shop-floor information mostly provide better performance than threshold policies, most real-world wafer fabs use MBS-based policies for batching decisions [17].…”

Section: Literature Review On Bp Control Rulesmentioning

confidence: 99%

Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication

Koo

Ruíz

2020

Applied Sciences

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In semiconductor wafer fabrication (wafer fab), wafers go through hundreds of process steps on a variety of processing machines for electrical circuit building operations. One of the special features in the wafer fabs is that there exist batch processors (BPs) where several wafer lots are processed at the same time as a batch. The batch processors have a significant influence on system performance because the repetitive batching and de-batching activities in a reentrant product flow system lead to non-smooth product flows with high variability. Existing research on the BP control problems has mostly focused on the local performance, such as waiting time at the BP stations. This paper attempts to examine how much BP control policies affect the system-wide behavior of the wafer fabs. A simulation model is constructed with which experiments are performed to analyze the performance of BP control rules under various production environments. Some meaningful insights on BP control decisions are identified through simulation results.

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“…1에 제시된 바와 같이 경통-P1렌즈-스페이서1-P2렌즈-스페이 서2-P3렌즈-스페이서3-P4렌즈-쉴드 순으로 조립되어 하 나의 카메라 렌즈 모듈을 구성한다 [5,12] . 최근에는 고해상 도를 가진 렌즈 모듈이 요구되면서 일부 렌즈는 유리렌즈 를 사용하는 경우도 있지만 대부분의 렌즈는 플라스틱과 같은 열가소성 수지를 재료로 사출공정을 통해 생산된다.…”

Section: 대상 제품unclassified

“…또한 작업장의 특성도 단일 기계 스케줄링, 병렬 기계 스케줄링, 오븐과 같은 뱃치 스케줄 링 [5,10] 등과 같이 다양하다. 또한 복잡한 시스템의 스케 줄링에 사용되는 방법으로는 여러 할당규칙 (Dispatching Rule)들을 사용하는데 [6,10] 그중에서도 Backward-Forward 규칙을 이용한 방법이 널리 사용된다 [2,5,10] . …”

Section: 스케줄러의 개념 설계unclassified

Development of Scheduler Based on Simulation for Phone Camera Lens Module Manufacturing System

Kim¹,

Lee²,

Lee³

et al. 2014

Journal of the Korea Society for Simulation

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Phone camera lens module is assembled with a barrel, multiple lenses, multiple spacers and a shield. The major processes of manufacturing system are injection molding, coating and assembly processes, and each process has multiple machines. In this paper, we introduce a scheduler based on simulation model which can be used for frequent rescheduling problem caused by urgent orders, breaking down of molds and failures of machines. The scheduling algorithm uses heuristic Backward-Forward method, and the objective is to minimize the number of tardy orders.

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A Review on Control Strategies of Batch Processing Machines in Semiconductor Manufacturing

Cited by 12 publications

References 42 publications

A Batching Strategy for Batch Processing Machine with Multiple Product Types

A Batching Strategy for Batch Processing Machine with Multiple Product Types

Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication

Development of Scheduler Based on Simulation for Phone Camera Lens Module Manufacturing System

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