2020
DOI: 10.1016/j.ymssp.2020.106634
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A review on control strategies for compensation of hysteresis and creep on piezoelectric actuators based micro systems

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Cited by 174 publications
(69 citation statements)
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“…Piezoelectric actuators (PEAs) have been widely used in precision positioning [ 1 ], energy harvesting [ 2 , 3 ] and tracking applications owing to their advantages of fast dynamic response, high electrical mechanical coupling efficiency and high positioning accuracy. The major drawback of PEA is internal hysteresis nonlinearity [ 4 ], which deteriorates their position/tracking performance. Several differential equation-based models, such as the Bouc–Wen model [ 5 ] and the Duhem model [ 6 ], as well as operator-based models, such as the Preisach model [ 7 ], the Prandtl–Ishlinskii (PI) model [ 8 ], the Krasnosel–skiiPokrovskii (KP) model [ 9 ] and the Jiles–Atherton model [ 10 ], have modeled and characterized the hysteresis behavior of PEAs.…”
Section: Introductionmentioning
confidence: 99%
“…Piezoelectric actuators (PEAs) have been widely used in precision positioning [ 1 ], energy harvesting [ 2 , 3 ] and tracking applications owing to their advantages of fast dynamic response, high electrical mechanical coupling efficiency and high positioning accuracy. The major drawback of PEA is internal hysteresis nonlinearity [ 4 ], which deteriorates their position/tracking performance. Several differential equation-based models, such as the Bouc–Wen model [ 5 ] and the Duhem model [ 6 ], as well as operator-based models, such as the Preisach model [ 7 ], the Prandtl–Ishlinskii (PI) model [ 8 ], the Krasnosel–skiiPokrovskii (KP) model [ 9 ] and the Jiles–Atherton model [ 10 ], have modeled and characterized the hysteresis behavior of PEAs.…”
Section: Introductionmentioning
confidence: 99%
“…Piezoelectric (PZT) actuators have received a great deal of attention over the last few decades in nano-positioning applications due to their high speed, stiffness, and fast response [1]. PZT actuators are widely used in applications such as robotic systems [2] [3], positioning of microscope stage [4] etc.…”
Section: Introductionmentioning
confidence: 99%
“…Feedforward compensation techniques are highly dependent on model accuracy and are consequently not robust to system parameter uncertainty, [19]. Repetitive and iterative control schemes are significantly complex when compared to the performance they deliver as they generally require accurate models for not only the linear dynamics but also that of hysteresis and at times, creep [20]. Non‐linear control strategies are dominated by sliding‐mode control schemes that are significantly complicated and encounter unwanted input chattering if poorly designed or deviated from the nominal system model [21].…”
Section: Introductionmentioning
confidence: 99%