A Review on Development and Optimization of Microheaters for High-Temperature &lt;italic&gt;In Situ&lt;/italic&gt; Studies

Spruit, Ronald G.; Omme, J. Tijn van; Ghatkesar, Murali Krishna; Garza, Héctor Hugo Pérez

doi:10.1109/jmems.2017.2757402

Cited by 62 publications

(56 citation statements)

References 115 publications

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“…In situ heating is achieved by placing a metal microheater on the bottom chip, which allows for Joule heating of the Nano-Cell. The metal heating coil resistance is linearly dependent on the temperature, which allows for simultaneous heating and accurate temperature measurement 56. In this way the software is able to control the temperature via a closed loop feedback algorithm, similar to our previous efforts for in situ heating in vacuum or gas 48,57.…”

mentioning

confidence: 93%

Liquid phase transmission electron microscopy with flow and temperature control

Omme

Sun

et al. 2020

J. Mater. Chem. C

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mentioning

confidence: 93%

Liquid phase transmission electron microscopy with flow and temperature control

Omme

Sun

et al. 2020

J. Mater. Chem. C

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“…Subsequently, MEMS-based microheaters [52,53] were developed that showed superior performances compared to classical TEM heating stages [54]. Classical TEM heating holders suffer from high spatial drift and lack the ability for rapid heating and cooling.…”

Section: Early Contributions Of Mems To Tem Instrumentationmentioning

confidence: 99%

Quo Vadis Micro-Electro-Mechanical Systems for the Study of Heterogeneous Catalysts Inside the Electron Microscope?

et al. 2020

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During the last decade, modern micro-electro-mechanical systems (MEMS) technology has been used to create cells that can act as catalytic nanoreactors and fit into the sample holders of transmission electron microscopes. These nanoreactors can maintain atmospheric or higher pressures inside the cells as they seal gases or liquids from the vacuum of the TEM column and can reach temperatures exceeding 1000 °C. This has led to a paradigm shift in electron microscopy, which facilitates the local characterization of structural and morphological changes of solid catalysts under working conditions. In this review, we outline the development of state-of-the-art nanoreactor setups that are commercially available and are currently applied to study catalytic reactions in situ or operando in gaseous or liquid environments. We also discuss challenges that are associated with the use of environmental cells. In catalysis studies, one of the major challenge is the interpretation of the results while considering the discrepancies in kinetics between MEMS based gas cells and fixed bed reactors, the interactions of the electron beam with the sample, as well as support effects. Finally, we critically analyze the general role of MEMS based nanoreactors in electron microscopy and catalysis communities and present possible future directions.

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“…The function of the microhotplate is to raise the temperature of the sensitive material to its optimum operating temperature and it is the main source of power consumption in the gas sensor. Bhattacharyya [ 38 ] and Spruit [ 39 ] have given excellent reviews on the design of microhotplates, concerning the power consumption, temperature homogeneity and mechanical stability.…”

Section: Mems Microhotplatementioning

confidence: 99%

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

et al. 2018

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The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility.

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A Review on Development and Optimization of Microheaters for High-Temperature <italic>In Situ</italic> Studies

Cited by 62 publications

References 115 publications

Liquid phase transmission electron microscopy with flow and temperature control

Liquid phase transmission electron microscopy with flow and temperature control

Quo Vadis Micro-Electro-Mechanical Systems for the Study of Heterogeneous Catalysts Inside the Electron Microscope?

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

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