A Review on Evolution, Current Trends and Future Scope of MEMS Piezoresistive Pressure Sensor

Abstract

Piezoresistive pressure sensors are the first MEMS devices to be commercialized. They work on the principle of change in resistivity of materials due to applied pressure. Literature reports lot of work and development in this area of sensing mechanisms. This paper provides a review on evolution of these sensors right from thin metal film based technology to the semiconductor technology. The paper presents the current trends in the design and use of piezoresistive pressure sensor. The paper also presents the future scope form these sensors which, will be around the extensive use of materials like SOI, SiC, DLC, CNT and Silicon Nanowires.