A Review on MEMS Silicon Resonant Accelerometers

Uncertainty modelling and computation in Bayesian operational modal analysis

“…Arising from modal response, this 'noise' will have a spatial correlation because of mode shapes, hence calling for a correlated noise modelling in (3-3). Furthermore, different channels in the measurement system (e.g., different resonators in a silicon resonant accelerometer) may interfere with each other (Messina, Njuguna and Palas, 2017;Zhang et al, 2024), which can also be a source of noise correlation among channels. Note that 'correlation' is used in a general context for its intuitive meaning, as strictly speaking it is the 'coherence' (in the frequency domain) that is introduced in Model 2, rather than the correlation (in the time domain).…”