A rigid ring electrostatic harmonic wobble motor with axial field

Paratte, L.; Racine, G.-A.; Rooij, N. F. de; Bornand, E.

doi:10.1109/sensor.1991.149029

Cited by 12 publications

(4 citation statements)

References 10 publications

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“…A pure rolling motion exists when the sliding frictional torque is larger than the electrostatic torque on the rotor. For the motor, this no-slip condition is given by sgn (14) where and are the sliding frictional coefficients at, respectively, the contact point and bearing.…”

Section: Normal Forces and Frictionmentioning

confidence: 99%

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An electrostatic lower stator axial-gap polysilicon wobble motor. I. Design and modeling

Legtenberg

Berenschot

Baar

et al. 1998

J. Microelectromech. Syst.

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This paper presents design issues and a theoretical model of electrostatically driven axial-gap polysilicon wobble motors. The motor design benefits from large axial rotor-to-stator overlap and large gear ratios, and motor designs with rotor radii of 50 and 100 m are capable of generating torques in the nanoNewtonmeter range at high electrostatic fields. Because of the large gear ratio, smaller angular steps and lower rotational speed are obtained, compared to radial-gap motor designs. Aspects like gear ratio, torque generation, excitation schemes and torque coverage, normal forces, friction, rotor kinetics, and dynamical behavior are addressed. The motor design is compliant to the integration of gear linkages with respect to mechanical power transmission. [180]

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Section: Normal Forces and Frictionmentioning

confidence: 99%

“…A lower stator axial-gap wobble motor design can solve some of the limitations of the radial-gap or side-drive design. This design was first presented by Paratte [14]- [16]. The tilting, vertical, and radial rotor instabilities of this lower stator axial-gap design are constrained by the bearing and stator geometry.…”

Section: Introductionmentioning

confidence: 99%

An electrostatic lower stator axial-gap polysilicon wobble motor. I. Design and modeling

Legtenberg

Berenschot

Baar

et al. 1998

J. Microelectromech. Syst.

View full text Add to dashboard Cite

show abstract

“…The most common configurations are film motors [7][8][9][10], micromotors [11][12][13], linear inchworm motors [14][15], comb motors [16][17][18] and wobble motors [19][20]. These topologies are well known in the literature and their disadvantage is rather complex structure and sophisticated control.…”

Section: Introductionmentioning

confidence: 99%

Novel multilayer differential linear electrostatic motor

Tapuchi

Baimel

2014

2014 International Symposium on Power Electronics, Electrical Drives, Automation and Motion

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The paper proposes a new type of linear electrostatic motor operated on a principle of the electric field effect. The unique structure of the motor and the use of new dielectric materials with high electric permittivity significantly increase its generated force. The generated force is further increased by using several layers of capacitors. The proposed motor has advanced motion control options that allow precise control of velocity and position profiles. Moreover, the motor is insensitive to electro-magnetic fields and has reduced power losses due to the fact that there are no cupper and hysteresis losses. Extensive simulation results of the proposed motor at different operation modes are presented and analyzed. The simulation results demonstrate proposed control methods and show the practicability of the motor.

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“…However, first fabrication attempts did not result in functional prototypes because of axial instabilities and axial electrostatic clamping forces perturbing radial motion [1]. A first functional axial-gap motor design was presented by Paratte [8], [9]. Bulk micromachining and later electroplating techniques were used to fabricate a rotor structure, which was assembled together with a pin axis and a stator structure to form the complete micromotor.…”

Section: Introductionmentioning

confidence: 99%