A Rigorous Multimodal Analysis and Design Procedure of a Uniplanar 180$^{\circ}$ Hybrid

Llamas, M.A.; Ribó, M.; Girbau, David; Pradell, L.

doi:10.1109/tmtt.2009.2022881

Cited by 10 publications

(7 citation statements)

References 14 publications

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“…Figure 22(a) shows the photograph of a second compact, uniplanar 180° phase switch fabricated on a quartz substrate [10]. In this case, it is based on an air-bridged CPW cross [57]. The two CPW arms of the cross are loaded with capacitive-contact MEMS switches (described in Section 5.2.1).…”

Section: Phase Switchesmentioning

confidence: 99%

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

Pradell¹,

Girbau²,

Ribó³

et al. 2018

MEMS Sensors - Design and Application

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Radio frequency microelectromechanical system (RF-MEMS) switches have demonstrated superior electrical performance (lower loss and higher isolation) compared to semiconductor-based devices to implement reconfigurable microwave and millimeter (mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch configurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of RF-MEMS switch topologies able to control the propagating modes of multimodal uniplanar structures (those based on a combination of coplanar waveguide (CPW), coplanar stripline (CPS), and slotline) will be described in detail. Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation. The switch-simulated results are compared to measurements, confirming the expected performances. Using an integrated RF-MEMS surface micromachining process, high-performance multimodal reconfigurable circuits, such as phase switches and filters, are developed with the proposed switch configurations. The design and optimization of these circuits are discussed and the simulated results compared to measurements.

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Section: Phase Switchesmentioning

confidence: 99%

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

Pradell¹,

Girbau²,

Ribó³

et al. 2018

MEMS Sensors - Design and Application

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show abstract

“…Figure 22(a) shows the photograph of a second compact, uniplanar 180° phase switch fabricated on a quarz substrate [10]. In this case, it is based on an air-bridged CPW cross [57]. The two CPW arms of the cross are loaded with capacitive-contact MEMS switches (described in Section 5.2.1).…”

Section: Phase Switchesmentioning

confidence: 99%

MEMS Sensors - Design and Application

Yellampalli¹

2018

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Radio frequency microelectromechanical system (RF-MEMS) switches have demonstrated superior electrical performance (lower loss and higher isolation) compared to semiconductor-based devices to implement reconigurable microwave and millimeter (mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch conigurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of RF-MEMS switch topologies able to control the propagating modes of multimodal uniplanar structures (those based on a combination of coplanar waveguide (CPW), coplanar stripline (CPS), and slotline) will be described in detail. Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation. The switch-simulated results are compared to measurements, conirming the expected performances. Using an integrated RF-MEMS surface micromachining process, high-performance multimodal reconigurable circuits, such as phase switches and ilters, are developed with the proposed switch conigurations. The design and optimization of these circuits are discussed and the simulated results compared to measurements.

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“…The presence of two fundamental modes in the same CPW section allows the design of innovative compact reconfigurable microwave circuits since more circuit functionality can be assembled in less area. This multimodal approach has already been applied by the authors to the design of 90º-hybrids (Llamas et al 2009) compact bandpass filters ) and also RF-MEMS enabled reconfigurable devices, such as phase switches (Llamas et al 2010; and bandpass filters with reconfiguration of centerfrequency (Contreras et al 2014) or bandwidth . RF-MEMS switches offer a simple yet effective solution to provide reconfiguration in multimodal circuits since these require a selective control of each CPW mode (even (Llamas et al 2010; and odd , which can be accomplished only in particular cases using semiconductor switches (Contreras et al 2011).…”

Section: Introductionmentioning

confidence: 99%

RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filters

et al. 2017

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Aquesta és una còpia de la versió author's final draft d'un article publicat a la revista Microsystem technologies.La publicació final està disponible a Springer a través de http://dx.doi.org/10.1007/s00542-017- This is a copy of the author 's final draft version of an article published in the journal Microsystem technologies. Abstract. In this paper, new RF-MEMS switch configurations are proposed to enable control of the propagating (even and odd) modes in multimodal CPW transmission structures. Specifically, a switchable air bridge (a switchable short-circuit for the CPW odd mode) and switchable asymmetric shunt impedances (for transferring energy between modes) are studied and implemented using bridge-type and cantilever-type ohmic-contact switches, respectively. The switchable air bridge is based in a novel double ohmic-contact bridge-type structure. Optimized-shape suspension configurations, namely folded-beam or diagonal-beam for bridge-type switches, and straight-shaped or semicircular-shaped for cantilever-type switches, are used to obtain robust structures against fabrication-stress gradients. The switches are modelled using a coupled-field 3D finite-element mechanical analysis showing a low to moderate pull-in voltage. The fabricated switches are experimentally characterized using S-parameter and DC measurements. The measured pull-in voltages agree well with the simulated values. From S-parameter measurements, an electrical model with a very good agreement for both switch states (ON and OFF) has been obtained. The model is used in the design of reconfigurable CPW multimodal microwave filters.

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A Rigorous Multimodal Analysis and Design Procedure of a Uniplanar 180$^{\circ}$ Hybrid

Cited by 10 publications

References 14 publications

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

MEMS Sensors - Design and Application

RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filters

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