A robust method for characterization of optical waveguides and couplers

Linear propagation properties for a 300 nm film height Silicon Nitride photonic integration platform in the optical telecom C-band

“…through annealing), the surface roughness (film roughness and waveguide sidewall roughness) together with the mode confinement at the operation wavelength (given by the waveguide cross-section, width, height, as well by the substrate and cladding heights) are the main factors determining the propagation loss. The propagation loss was derived both from the transmission spectrum of MZIs [21] and the backscattering of spiral waveguides, Fig. 1.…”