A rotary flexural bearing for micromanufacturing

Luo, Hong; Zhang, B.; Zhou, Zhixiong

doi:10.1016/j.cirp.2008.03.033

Cited by 10 publications

(4 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Its fatigue analysis can refer to the published literature, such as Luo et al. 20 In order to clamp the micro-tool, the clamping force F c-t and corresponding pressure P c-t acting on micro-tool are at least…”

Section: Micro-couplingmentioning

confidence: 99%

Development of a high-speed and precision micro-spindle for micro-cutting

Zhou

Huang

et al. 2014

Int. J. Precis. Eng. Manuf.

View full text Add to dashboard Cite

Mechanical micromachining using micro-machine tools is very competitive in manufacturing geometrically complex 3D micro-parts in various engineering materials with advantages of small space, energy-efficient, low equipment production and operation costs. As key components of micro-machine tools, micro-spindles directly determine the performance of micro-machine tools and the application and development of mechanical micromachining technology. This study proposes a novel design concept of the separately spindle and tool and one-piece tool/rotor structure for micro-spindles, whose micro-tool can maintain good rotational accuracy at high rotational speeds. In the principle prototype micro-spindle, an air driven turbine was used as power spindle. The design and optimization of the micro-spindle were conducted. The fabrication and evaluation of the prototype micro-spindle were presented. The results of the principle prototype micro-spindle were analyzed and some efforts for the subsequent micro-spindle were proposed.

show abstract

Section: Micro-couplingmentioning

confidence: 99%

Development of a high-speed and precision micro-spindle for micro-cutting

Zhou

Huang

et al. 2014

Int. J. Precis. Eng. Manuf.

View full text Add to dashboard Cite

show abstract

“…In view of (13) and (16) as well as the relation R = r + l, the maximum one-sided rotational angle of the MCRF can be determined:…”

Section: ) Stress Calculationmentioning

confidence: 99%

“…It is known that a compliant rotary stage can be devised using leaf flexures with fixed-fixed constraint [14], [16], [17]. However, its rotational range is limited due to the mechanism overconstraint [18].…”

mentioning

confidence: 99%

Design of a Large-Range Compliant Rotary Micropositioning Stage With Angle and Torque Sensing

Xu¹

2015

IEEE Sensors J.

View full text Add to dashboard Cite

This paper presents the design, modeling, and experimental testing of a flexure-based compliant rotary micropositioning stage with a large rotational range. The rotary stage is devised based on multistage compound radial flexures. One uniqueness lies in that it owns both a compact size and a large rotary stroke. Dominant parameters of the stage are determined based on established analytical models to cater for the requirements on rotational angle and driving torque. These models are verified by conducting finite-element analysis simulations, which also demonstrate the stage performance. A prototype rotary stage is developed using a rotary voice coil motor. A strain-gauge sensor is designed to measure both rotational angle and experienced torque of the rotary stage. The sensitivities of the two-role sensor are derived analytically and calibrated experimentally. Results show that the developed stage is capable of rotary positioning with a resolution of 20 µrad over the range of 10°under an approximately infinite fatigue-life, while keeping a compact physical size. The torque sensor exhibits a resolution of 0.128 mN-m with a measuring range of 1.23 N-m. Moreover, the reported idea can be extended to the design of multiaxis rotary stage.Index Terms-Compliant mechanism, mechanism design, rotary stage, micropositioning, sensors and actuators.

show abstract

“…Rotary flexural bearing is a novel bearing based on the motion principles of elastic flexures, which is expected to be capable of providing rotational oscillations of one complete revolution, with the characteristics of high repeatability, smooth motions, no mechanical wear and no lubrication requirements, no gaps or interfaces, zero maintenance, as well as compactness [1,2]. Such a bearing is targeted for future use in micromanufacturing and precision metrology, such as micro EDM [3], micro ECM [4], ultrasonic micromachining [5], laser micromachining [6], coordinate measuring machines, just to name a few.…”

Section: Introductionmentioning

confidence: 99%

Wire Electrical Discharge Machining (<i>Wire EDM</i>) Cutting of Flexures for a Rotary Flexural Bearing Fabrication

Luo

Zhou

Zhang

et al. 2011

AMR

View full text Add to dashboard Cite

Wire electrical discharge machining (Wire EDM) cutting of flexures for a rotary flexural bearing fabrication is developed. The results of FEA calculation and theoretical analysis show that one of the main factors affecting flexures’ machining is the weak torsional stiffness of the bearing cage, thus excessive deflections due to machining stress, heat generation and spark-induced vibrations may occur. To minimize flexure deflection during the machining process, a specially designed fixture is utilized. Other technical measures, including residual stress relief before and after Wire EDM cutting, reasonable cutting sequence planning, multiple-cutting (i.e., rough cut followed by several trim cuts) etc., are also adopted for cutting. Dimensional accuracy of ±5µm was obtained over the 150µm thickness for the bearing flexures, a variation of less than 3µm was achieved for the flexures of opposing sides, and surface roughness of better than Ra 0.3μm was obtained for the flexures of the entire bearing cage. These results show the validity of measures aforementioned.

show abstract

A rotary flexural bearing for micromanufacturing

Cited by 10 publications

References 7 publications

Development of a high-speed and precision micro-spindle for micro-cutting

Development of a high-speed and precision micro-spindle for micro-cutting

Design of a Large-Range Compliant Rotary Micropositioning Stage With Angle and Torque Sensing

Wire Electrical Discharge Machining (<i>Wire EDM</i>) Cutting of Flexures for a Rotary Flexural Bearing Fabrication

Contact Info

Product

Resources

About