A scalable pressure sensor based on an electrothermally and electrostatically operated resonator

Hajjaj, Amal Z.; Alcheikh, Nouha; Hafiz, Abdullah Al; Ilyas, Saad; Younis, Mohammad I.

doi:10.1063/1.5003563

Cited by 50 publications

(25 citation statements)

References 22 publications

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“…Moreover, one should note that the arch response is highly dependent on the surrounding pressure [21]. Pressure variation leads to a different operating VTh to activate different internal resonances.…”

Section: Discussionmentioning

confidence: 99%

Multiple internal resonances in MEMS arch resonators

et al. 2018

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Micromachined shallow arch resonant beams have attracted significant attention thanks to their rich dynamical behavior, inherent nonlinearities, and the potential to excite various internal resonances. Currently, there is a lack of comprehensive experimental studies for the various types of internal resonances in arches and particularly at the micro and nano scales. Here, we aim to investigate and identify different types of internal resonances of an initially curved beam, electrothermally actuated and electrostatically driven, by electrical characterization techniques. Upon changing the electrothermal voltage of silicon micromachined arches, the second symmetric natural frequency of an arch is adjusted to near twice, three times, and four times the fundamental natural frequency, which gives rise to 2:1, 3:1, and 4:1 autoparametric resonances between the two modes. These resonances are demonstrated experimentally. We show various frequency-response curves of the total response around the excitation frequency and highlight the contribution of each mode before, during, and after the internal resonances. Allandeviation results are also shown indicating enhanced frequency stabilization of the arch oscillation when experiencing internal resonances. These studies motivate further research in this direction to exploit internal resonances of micromachined resonators for practical applications, such as sensors and mechanical amplifier.

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Section: Discussionmentioning

confidence: 99%

Multiple internal resonances in MEMS arch resonators

et al. 2018

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“…Operating the resonator near the buckling point maximizes the sensitivity to variation in the first mode frequency to physical phenomena that affect the axial stress such as cooling and heating effects [11]. Exposing the resonator to gases with higher/lower thermal conductivity compared with Nitrogen reduces/increases the axial stress inside the microbeam, which alters the values of the resonance frequencies.…”

Section: Principe Of Operationmentioning

confidence: 99%

“…Moreover, several dynamical features, such as the bifurcation points, internal resonance, and secondary resonances are utilized to improve the sensor sensitivity. In a previous work [11], we exploited the buckling point (bifurcation point) of heated silicon bridge to demonstrate sensitive and scalable pressure sensor. The concept is based on tracking the fundamental frequency of the electrothermally buckled bridge upon changing the surrounding pressure.…”

Section: Introductionmentioning

confidence: 99%

A Sensitive Resonant Gas Sensor Based on Multimode Excitation of a Buckled Beam

Hajjaj

Jaber

Alcheikh

et al. 2019

Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- And Nanosystems

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The quest for ultra-sensitive low-cost miniaturized gas sensors in the past few decades has sparked interest to seek alternative approaches other than the conventional gas sensors that need large surface areas and special chemicals for functionalization. MEMS thermal conductivity based gas sensors [1, 2] have been shown to be among the promising candidates since they do not rely on gas absorption or chemical reactions. These sensors show long lifetime and great stability compared to conventional gas sensor. The thermal conductivity based gas sensors rely on the resistance variation of the heated structures due to gas exposure [1]. Typical values of resistance changes are less than few percent. Here, we present a thermal conductivity based gas sensor relying on frequency shifts of an electrothermally heated bridge operated near the buckling point, which leads to ultra-high sensitivity.

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“…This can be attributed to the unique advantages of low power consumption, ease of fabrication, and compatibility with CMOS circuits [1]. The operation principle is based on tracking the frequency shift in the fundamental mode due to external stimuli, such as gas adsorption [2], pressure change [3], and protein detection [4]. However, the need to operate them under controlled environmental conditions and at low pressure limited their practicality [5].…”

Section: Introductionmentioning

confidence: 99%

Simultaneous Sensing of Vapor Concentration and Temperature Utilizing Multimode of a MEMS Resonator

et al. 2018

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Most gas sensors suffer from the cross sensitivity to environmental temperature, which significantly reduces the accuracy and reliability of measurements. Current solutions require the fabrication of a thermometer in close proximity to the gas sensor or an identical reference sensor to compensate for the sensor drift due to temperature. This increases the device size, fabrication cost, and the power required to operate the sensor; and also adds to the complexity of the device circuit for signal processing. Here, we demonstrate a single resonant gas sensor, based on a microbeam uniformly coated with metal-organic frameworks (MOFs), capable of simultaneously measuring environmental temperature and gas concentration (water vapor). Using the electrostatic harmonic voltage, we actuate the microbeam simultaneously near the first and second vibration modes. The frequency shifts of these two modes due to physical stimuli changes are monitored in real time. The lower electrode of the clamped-clamped microbeam resonator is perforated to reduce the effect of squeeze film damping, thereby allowing operation under atmospheric pressure. We demonstrate experimentally the effectiveness of this technique to measure the environmental temperature and gas concentration.

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A scalable pressure sensor based on an electrothermally and electrostatically operated resonator

Abstract: CitationHajjaj AZ, Alcheikh N, Hafiz MAA, Ilyas S, Younis MI (2017) A scalable pressure sensor based on an electrothermally and electrostatically operated resonator. Applied Physics Letters 111: 223503. Available: http://dx.

Cited by 50 publications

References 22 publications

Multiple internal resonances in MEMS arch resonators

Multiple internal resonances in MEMS arch resonators

A Sensitive Resonant Gas Sensor Based on Multimode Excitation of a Buckled Beam

Simultaneous Sensing of Vapor Concentration and Temperature Utilizing Multimode of a MEMS Resonator

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