2018
DOI: 10.1016/j.cie.2018.06.017
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A scatter simulated annealing algorithm for the bi-objective scheduling problem for the wet station of semiconductor manufacturing

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Cited by 73 publications
(28 citation statements)
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“…Scheduling is another concern in semiconductor manufacturing due to its vast number of steps and jobs [158][159][160], confirmed by the majority of the identified studies in Table 6. Efficient order scheduling structures are required for balancing the production load and capacity throughout all the production stages [161].…”
Section: Data Mining Applications For Production and Production Schedmentioning
confidence: 81%
“…Scheduling is another concern in semiconductor manufacturing due to its vast number of steps and jobs [158][159][160], confirmed by the majority of the identified studies in Table 6. Efficient order scheduling structures are required for balancing the production load and capacity throughout all the production stages [161].…”
Section: Data Mining Applications For Production and Production Schedmentioning
confidence: 81%
“…In some cases of steel processing or semiconductor manufacturing, the maintenance start time depends on a specific threshold value such as maximum continuous working time or maximum dirt. is kind of assumption can be found in Qi et al [18], Mosheiov and Sarig [19], Cui and Lu [20], Su and Wang [21], Pang et al [22], Huang et al [23], Chung et al [24], etc. Another deterministic case is when the maintenance period [u, v] is arranged in advance and maintenance operations should be undertaken within the period [u, v], where the maintenance time (w) is not longer than the maintenance period, i.e., w ≀ (v − u).…”
Section: Introductionmentioning
confidence: 99%
“…Li, Liu, Zhang, & Ye, 2016), secure encryption (Y. , image filtering (H. Zhao, Gao, Wang, Pan, & Graphics, 2016;H. Zhao, Jiang, Jin, Du, & Li, 2018), image editing (Xujie Li, Huang, Zhao, Wang, & Hu, 2020;, structural topology optimization (Shaohua Zhang, Li, Zhong, & Xiang, 2014), scheduling problem (Pang, Zhou, Tsai, & Chou, 2018;H. Zhou, Pang, Chen, & Chou, 2018), face recognition and micro-expression recognition (S. J.…”
Section: Introductionmentioning
confidence: 99%