2015
DOI: 10.1002/adma.201502544
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A Self‐Aligned High‐Mobility Graphene Transistor: Decoupling the Channel with Fluorographene to Reduce Scattering

Abstract: The conduction channel of a graphene field-effect transistor (FET) is decoupled from the parasitic charge impurities of the underlying substrate. Fluorographene as a passivation layer is fabricated between the oxide substrate and channel, and a self-aligned gate-terminated FET is also fabricated. This approach significantly reduces the scattering and, as a result, the mobility increases ten fold.

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Cited by 53 publications
(34 citation statements)
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“…Nitrogen dopant incorporated into the graphene lattice via CVD is mostly found in pyrrolic and pyridinic configurations, which are always accompanied by an increase in defect densities and an increased I D / I G ratio to values ranging from 0.3 to 2 (few-layered N-doped graphene shows a lower I D / I G due to a high vertical phonon vibration nature). Both nitrogen incorporation (ionic impurities, long-range scattering) [ 44 ] and its accompanied increase in defect densities (bonding disorder and vacancies, short-range scattering) [ 45 ] degrade graphene carrier conductivity and mobility [ 20 ]. Recently, George Sarau et al realized N-doped graphene with a low defect density via the post-annealing approach in which the nitrogen atoms are mostly arranged in pyridinic configurations [ 23 ].…”
Section: Resultsmentioning
confidence: 99%
“…Nitrogen dopant incorporated into the graphene lattice via CVD is mostly found in pyrrolic and pyridinic configurations, which are always accompanied by an increase in defect densities and an increased I D / I G ratio to values ranging from 0.3 to 2 (few-layered N-doped graphene shows a lower I D / I G due to a high vertical phonon vibration nature). Both nitrogen incorporation (ionic impurities, long-range scattering) [ 44 ] and its accompanied increase in defect densities (bonding disorder and vacancies, short-range scattering) [ 45 ] degrade graphene carrier conductivity and mobility [ 20 ]. Recently, George Sarau et al realized N-doped graphene with a low defect density via the post-annealing approach in which the nitrogen atoms are mostly arranged in pyridinic configurations [ 23 ].…”
Section: Resultsmentioning
confidence: 99%
“…Ultrahigh carrier mobility is a key aspect of graphene that motivates its usage for technological applications of next‐generation electronic devices and for fundamental studies of Dirac fermions . However, the carrier mobility of graphene on SiO 2 ‐covered silicon wafers is much lower than intrinsic values predicted by theory .…”
mentioning
confidence: 99%
“…Carbon atoms align themselves in a hexagonal lattice perfectly. Pristine graphene has no bandgap; therefore, it acts as a semimetal [42]. Currently available methods aiming for pristine graphene include mechanical exfoliation [43] and liquid exfoliation.…”
Section: The Function Of Photoelectrode and Its Requirementsmentioning
confidence: 99%