A self-compensating Langmuir probe for use in rf (13.56 MHz) plasma systems

Chatterton, P. A.; Rees, J A; Wu, Wei; Al-Assadi, Khalid F.

doi:10.1016/0042-207x(91)90022-b

Cited by 89 publications

(40 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…These source features constitute a challenge in the electrostatic probe data interpretation [6,7]. The solution adopted in the design consists in the RF compensation through a reference electrode, with an area relatively larger than that of the electrode itself [8]. The presence of a magnetic field is known to affect the Langmuir probe characteristic and this issue has been accounted for through a design solution with suitable orientation between the sensor collecting surface and the magnetic field.…”

Section: Design Guidelinesmentioning

confidence: 99%

Design of a system of electrostatic probes for the RF negative ion source of the SPIDER experiment

Spolaore¹,

Serianni²,

Leorato³

et al. 2010

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

show abstract

Section: Design Guidelinesmentioning

confidence: 99%

Design of a system of electrostatic probes for the RF negative ion source of the SPIDER experiment

Spolaore¹,

Serianni²,

Leorato³

et al. 2010

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…We present here results from Langmuir probe measurements only for one set of working conditions in the system -for active parts of modulation cycle t a,BTO = 400 µs and t a,STO = 1050 µs. An RF compensated [7] cylindrical probe with radius r p = 150 µm and length l p = 1 mm was used. The grounded metallic reactor acted as voltage reference electrode for the probe.…”

Section: Methodsmentioning

confidence: 99%

Deposition of Ba_xSr_1–xTiO₃ thin Films by Double RF Hollow Cathode Plasma Jet System

Hubička

Virostko

Tichý

et al. 2008

Contrib. Plasma Phys.

View full text Add to dashboard Cite

Low-pressure plasma jet system with two hollow cathodes was used for deposition of BaxSr1−xTiO3 (BSTO) ferroelectric thin films. Two RF hollow cathode plasma jet guns were pointed to the substrate where BSTO thin films were deposited. High density RF hollow cathode discharge was generated in ceramic nozzles made of SrTiO3 (STO) and BaTiO3 (BTO). Pulse modulated RF power was applied on water-cooled copper block insulated from the plasma by ceramic and grounded stainless steel shield. In the experiment, the composition of BSTO films was controlled by magnitude of average RF power applied on particular plasma jet guns with STO and BTO nozzles. By this method, BSTO films were deposited on single crystal silicon substrate and on Pt top of Pt/TiO2/SiO2/Si multi-layer system. X-ray diffraction proved that BSTO thin films were polycrystalline with perovskite structure and measurement of dielectric properties showed ferroelectric hysteresis loop at room temperature. Time resolved Langmuir probe system and plasma impedance monitor were used for in situ plasma diagnostics and control of deposition conditions. Furthermore, plasma jets were analyzed during the deposition process by spatially resolved optical emission spectroscopy.

show abstract

“…9 Variation of concentration of carboxyl group with DC Power density due to the reason that the surface modification mechanism at a power density of 1.83 W cm -2 did not favour the formation of carboxyl group. This is attributed to energies of the various ions and the excited neutrals present in the plasma that decides the mechanism of surface modification [28][29][30]. For the system process parameters shown in Fig.…”

Section: Concentration Of Carboxyl Group (Meq/100 G)mentioning

confidence: 99%

Investigation on the Enhancement of Antimicrobial Activity of Neem Leaf Extract Treated Cotton Fabric Using Air and Oxygen DC Plasma

Krishnakumar

Jayakumar

Rajendran³

2009

Plasma Chem Plasma Process

View full text Add to dashboard Cite

The enhancement of hydrophilicity of DC air and oxygen plasma treated cotton fabric and its effect on the antimicrobial efficacy when treated with neem leaf extract is reported in this paper. The axial and radial ion density distribution between the electrodes was studied using Langmuir probe to place the fabric between the electrodes for effective plasma treatment. The effect of system parameters viz., process gas pressure, DC power density and plasma exposure time on the hydrophilicity and hence the antimicrobial efficacy after the neem leaf extract treatment was analysed and optimised. The functional group present in the cellulose units of the cotton fabric before and after plasma treatment was identified and estimated using standard tests and analysed using ATR-FTIR spectra. The surface morphology of untreated and plasma treated cotton fabric was analyzed with the help of SEM micrograph. The mean pore diameter of the fabric matrix was calculated and air permeability was measured before and after plasma treatment to account for the improved capillarity due to plasma treatment. The formation of functional groups with increased polarity and improved capillary action of the plasma treated fabric enhances its hydrophilicity which in turn improves the sorption of neem leaf extract and hence the antimicrobial activity.

show abstract

A self-compensating Langmuir probe for use in rf (13.56 MHz) plasma systems

Cited by 89 publications

References 10 publications

Design of a system of electrostatic probes for the RF negative ion source of the SPIDER experiment

Design of a system of electrostatic probes for the RF negative ion source of the SPIDER experiment

Deposition of Ba_xSr_1–xTiO₃ thin Films by Double RF Hollow Cathode Plasma Jet System

Investigation on the Enhancement of Antimicrobial Activity of Neem Leaf Extract Treated Cotton Fabric Using Air and Oxygen DC Plasma

Contact Info

Product

Resources

About

A self-compensating Langmuir probe for use in rf (13.56 MHz) plasma systems

Cited by 89 publications

References 10 publications

Design of a system of electrostatic probes for the RF negative ion source of the SPIDER experiment

Design of a system of electrostatic probes for the RF negative ion source of the SPIDER experiment

Deposition of BaxSr1–xTiO3 thin Films by Double RF Hollow Cathode Plasma Jet System

Investigation on the Enhancement of Antimicrobial Activity of Neem Leaf Extract Treated Cotton Fabric Using Air and Oxygen DC Plasma

Contact Info

Product

Resources

About

Deposition of Ba_xSr_1–xTiO₃ thin Films by Double RF Hollow Cathode Plasma Jet System