A self-suspended MEMS film convertor for dual-band infrared scene projection

Zhou, Lang; Wang, Xin; Yang, Suhui; Zhang, Jinying; Gao, Yanze; Xu, Chunguang; Li, Defang; Shi, Qingfeng; Li, Zhuo

doi:10.1016/j.infrared.2020.103231

Cited by 15 publications

(8 citation statements)

References 20 publications

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“…Table 1 summarizes the comparison of t r and t f based on the measured and simulated results. Compared to the state-of-the-art time response in a 2D infrared transducer (5.02 ms of t r and 2.76 ms of t f ) 23 , the proposed 3D transducer provided a much faster time response improvement of 428% for t r and 421% for t f . However, there was still a certain deviation between the simulated and measured results, and the maximum percentage error was 21.9%.…”

Section: Experiments and Measurementmentioning

confidence: 95%

“…Compared to other high light-absorption materials (such as carbon nanotubes 21 and black silicon 22 ), metal-black coatings have the advantages of low density and low heat capacity, which contribute to a better time response for infrared emitters. In addition, due to the mature processing technology of infrared emitters, the pixel array achieved was sized 1300 × 1300, the apparent temperature was more than 489 K, and the frame rate was 50 Hz 23 . However, the 2D MEMS thin film emitter utilized in-plane microstructures to control the thermophysical properties 17 , 18 .…”

Section: Introductionmentioning

confidence: 99%

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Demonstration of thermal modulation using nanoscale and microscale structures for ultralarge pixel array photothermal transducers

Zhang

et al. 2021

Microsyst Nanoeng

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Large-pixel-array infrared emitters are attractive in the applications of infrared imaging and detection. However, the array scale has been restricted in traditional technologies. Here, we demonstrated a light-driven photothermal transduction approach for an ultralarge pixel array infrared emitter. A metal-black coating with nanoporous structures and a silicon (Si) layer with microgap structures were proposed to manage the thermal input and output issues. The effects of the nanoscale structures in the black coating and microscale structures in the Si layer were investigated. Remarkable thermal modulation could be obtained by adjusting the nanoscale and microscale structures. The measured stationary and transient results of the fabricated photothermal transducers agreed well with the simulated results. From the input view, due to its wide spectrum and high absorption, the black coating with nanoscale structures contributed to a 5.6-fold increase in the temperature difference compared to that without the black coating. From the output view, the microgap structures in the Si layer eliminated the in-plane thermal crosstalk. The temperature difference was increased by 340% by modulating the out-of-plane microstructures. The proposed photothermal transducer had a rising time of 0.95 ms and a falling time of 0.53 ms, ensuring a fast time response. This method is compatible with low-cost and mass manufacturing and has promising potential to achieve ultralarge-array pixels beyond ten million.

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Section: Experiments and Measurementmentioning

confidence: 95%

Section: Introductionmentioning

confidence: 99%

Demonstration of thermal modulation using nanoscale and microscale structures for ultralarge pixel array photothermal transducers

Zhang

et al. 2021

Microsyst Nanoeng

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“…The optical absorption layer absorbs the incident visible light energy and the pixels are heated up to produce infrared radiation. The common absorption layer materials of MEMS infrared thin film transducer include metal black [18,35,36] and carbon nanotube composite materials [37]. The metal black was selected in this work because of much higher absorptivity (above 90% [18]) compared to that of carbon nanotube composite materials (about 60% [37]).…”

Section: Structure Of Mems Infrared Thin Film Transducersmentioning

confidence: 99%

“…Direct radiation infrared image generation technology can directly produce infrared radiation through the electro-optical conversion (such as light emitting diode [12], laser diode array [13], etc. ), electro-thermal-optical conversion (such as resistor array [14][15][16]), and optical-thermal-optical conversion (such as MEMS infrared thin film transducer [17][18][19]). Modulated radiation infrared image generation technology (such as Digital Micromirror Devices, DMD [20,21]; IR liquid crystal light valve [22], MEMS optical attenuator [23], etc.)…”

Section: Introductionmentioning

confidence: 99%

“…Without requirement of read-in integrated circuits, the MEMS infrared thin film transducer can achieve larger scale pixels. It has been fabricated into 1313 × 1313 pixels and covers the wavelength range of 3~12 µm [17][18][19]. However, because this transducer is a soft composite film suspended on a large solid ring and its thickness is only several micrometers, it suffers from poor mechanical stability.…”

Section: Introductionmentioning

confidence: 99%

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A Robust Infrared Transducer of an Ultra-Large-Scale Array

Zhang

Shi

et al. 2020

Sensors

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A robust micro-electro-mechanical systems (MEMS) infrared thin film transducer of an ultra-large-scale array was proposed and fabricated on a 4-inch silicon wafer. The silicon substrate and micro cavities were introduced. This novel transducer had excellent mechanical stability, time response, and state-of-the-art pixel scale. It could bear a load of 1700 g and its load pressure was improved by more than 5.24 times and time constant decreased by 50.7% compared to the traditional soft infrared thin film transducer. The array scale of its pixels exceeded 2k × 2k. The simulation and measured results of the transient temperature and radiation intensity were well consistent. Illuminated by a 532 nm laser with a frequency of 50 Hz and 50% duty cycle, the thermal decay time of the proposed transducer was 6.0 ms. A knife-edge image was utilized for spatial resolution test and the full width at half maximum (FWHM) of the proposed transducer was 24% smaller than the traditional soft one. High-resolution infrared images were generated using the proposed robust transducer. These results proved that the robust transducer was promising in infrared image generation.

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High‐Performance Infrared Scene Generation Using a Double‐S Microbridge Photothermal Film Emitter With Ultralarge Array

Hao,

Ling,

et al. 2024

Advanced Optical Materials

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Infrared emitters are highly desirable for applications in infrared imaging and stealth technology. Photothermal film emitters, which are driven by light, have garnered considerable interest due to their excellent photothermal properties and ease of fabrication. However, existing photothermal films often suffer from low photothermal conversion efficiency (PCE) and limited array scale. Here, a photothermal film emitter featuring a double‐S microbridge structure is presented, which comprehensively considering the PCE and frame rate. Initially, Si microbridges are fabricated within each microstructure to support the photothermal film. The pattern structure is then arranged into a double‐S configuration to manipulate the thermal conductivity. By optimizing the length and width of the double‐S pattern, high PCE and fast frame rates are achieved. The double‐S microbridge structure photothermal film emitter is fabricated with a 4‐inch diameter, forming an ultra‐large array with over 3000 × 3000 pixels. The absorption and photothermal conversion characteristics are studied, revealing a maximum temperature of 582.70 K and a highest PCE of 16.32%. Time‐dependent photothermal response demonstrated the emitter's rapid heat storage and release capabilities. Additionally, an infrared scene generator is realized. These results position the photothermal film emitter as a promising solution for infrared imaging and dynamic scene generation.

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A self-suspended MEMS film convertor for dual-band infrared scene projection

Cited by 15 publications

References 20 publications

Demonstration of thermal modulation using nanoscale and microscale structures for ultralarge pixel array photothermal transducers

Demonstration of thermal modulation using nanoscale and microscale structures for ultralarge pixel array photothermal transducers

A Robust Infrared Transducer of an Ultra-Large-Scale Array

High‐Performance Infrared Scene Generation Using a Double‐S Microbridge Photothermal Film Emitter With Ultralarge Array

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