2016
DOI: 10.1088/1674-4926/37/4/044008
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A sensitive charge scanning probe based on silicon single electron transistor

Abstract: Single electron transistors (SETs) are known to be extremely sensitive electrometers owing to their high charge sensitivity. In this work, we report the design, fabrication, and characterization of a silicon-on-insulator-based SET scanning probe. The fabricated SET is located about 10 μm away from the probe tip. The SET with a quantum dot of about 70 nm in diameter exhibits an obvious Coulomb blockade effect measured at 4.1 K. The Coulomb blockade energy is about 18 meV, and the charge sensitivity is in the or… Show more

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Cited by 2 publications
(1 citation statement)
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“…[1,2] In such nanoscale dimensions, the electronic transport characteristics of the device can perform quite differently from those in bulk silicon. [3,4] Indeed, the reduction of device dimensions enhances the importance of quantum mechanical effects. [2,5,6] For example, the conductance oscillation of nanowire transistors caused by inter-sub-band scattering in one-dimensional (1D) transport, [7,8] the single-electron tunneling current and quantum interference originated from the impurity energy levels of the dopants.…”
Section: Introductionmentioning
confidence: 99%
“…[1,2] In such nanoscale dimensions, the electronic transport characteristics of the device can perform quite differently from those in bulk silicon. [3,4] Indeed, the reduction of device dimensions enhances the importance of quantum mechanical effects. [2,5,6] For example, the conductance oscillation of nanowire transistors caused by inter-sub-band scattering in one-dimensional (1D) transport, [7,8] the single-electron tunneling current and quantum interference originated from the impurity energy levels of the dopants.…”
Section: Introductionmentioning
confidence: 99%