Due to the increasing demand for sensors operating in harsh environment and significant advancements in high quality SiC layers free of stress,-this material has received a great interest for the fabrication of micro-and nano-electromechanical systems (MEMS and NEMS). Recent developments have allowed the fabrication of many mechanical SiC devices, especially resonator devices, with a simple cantilever or bridge, which are very attractive as transducers for chemical or biological sensors. Cantilevers, bridges and other resonant structures were successfully fabricated. The first results have clearly shown the advantage of SiC compared to Si for many sensors applications.