1998
DOI: 10.1016/s0924-4247(98)00123-x
|View full text |Cite
|
Sign up to set email alerts
|

A silicon microsuspension for disk drive applications

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
2
0

Year Published

2017
2017
2020
2020

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(2 citation statements)
references
References 2 publications
0
2
0
Order By: Relevance
“…Microelectronic devices are becoming more and more popular as they have a potential for application in polymer-based MEMS and actuators in the biomedical field [9]. Polymer based magnetic nanoparticles are used in many electronic devices for formation of p-n junctions, design of conductive * E-mail: arshadrahictn@gmail.com paths and to alter the material properties by thermal migration of charge [10][11][12][13][14][15][16].…”
Section: Introductionmentioning
confidence: 99%
“…Microelectronic devices are becoming more and more popular as they have a potential for application in polymer-based MEMS and actuators in the biomedical field [9]. Polymer based magnetic nanoparticles are used in many electronic devices for formation of p-n junctions, design of conductive * E-mail: arshadrahictn@gmail.com paths and to alter the material properties by thermal migration of charge [10][11][12][13][14][15][16].…”
Section: Introductionmentioning
confidence: 99%
“…MEMS were first developed in the microelectronics industry. The rapid growth of integrated circuit (IC) industry is connected with MEMS which were used to produce tiny devices [14], such as sensors [15], switches [16], filters [17], and silicon gears [18]. Nowadays, in various markets, such as automotive, electronics, medical, communications and defensive technologies, MEMS find many applications [19].…”
Section: Introductionmentioning
confidence: 99%