A silicon nitride microphone diaphragm inspired by the ears of the parasitoid fly <i>Ormia ochracea</i>

Miles, Ronald N.; Gibbons, C.; Gao, Jia; Yoo, Kicheon; Su, Quang T.; Cui, Weili

doi:10.1121/1.4809052

Cited by 26 publications

(42 citation statements)

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“…This type of biomimetic microphone possesses high resolution of sound localisation capability and a high sensitivity response due to the mechanical coupling between two vibrating plates of the microphone, just as in the behaviour of the Ormia's tympana where the combination of rocking and bending resonance modes increases the inter-aural intensity difference (IID) and the interaural phase difference (IPD) between its two tympana. MEMS microphones based on Ormia can be categorized into singleplate models [1,2] and two-plate models [3], or symmetric models [4] and asymmetric models [5] depending in their geometries.…”

Section: Introductionmentioning

confidence: 99%

Development of a biologically inspired MEMS microphone

et al. 2017

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Abstract-A multi-band operational MEMS microphone inspired by the hearing organ of Ormia ochracea is presented. The novel feature is that the device has both integrated capacitive and piezoelectric sensing capability. Similar to our previous designs, the new design works as a bi-directional microphone and has four separate resonance frequencies below 10 kHz, with intended application for human speech recognition scenarios. Since the capacitive sensing only depends on the displacement of the rotating plates, it provides 11.6 mV/Pa acoustic sensitivity at the first, rocking resonance mode, while the electric response produced by the piezoelectric actuators is almost zero around the same frequency. However, the piezoelectric readout supports a faster transient response and produces less noise at low frequencies than the capacitive sensing method. The complementary interaction between these two sensing methods in one device thus increases the overall electrical response and its accuracy.

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Section: Introductionmentioning

confidence: 99%

Development of a biologically inspired MEMS microphone

et al. 2017

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“…Their experiment shows that it is much quieter than the uncoupled microphone with the same separation. 4,5 Liu et al investigated the ITD response and introduced a method to optimize its performance. 6 Kuntzman and Hall introduced a rotational capacitive micromachined ultrasonic transducer.…”

Section: Introductionmentioning

confidence: 99%

A biomimetic coupled circuit based microphone array for sound source localization

Han

et al. 2015

The Journal of the Acoustical Society of America

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An equivalent analog circuit is designed to mimic the coupled ears of the fly Ormia ochracea for sound source localization. This coupled circuit receives two signals with tiny phase difference from a space closed two-microphone array, and produces two signals with obvious intensity difference. The response sensitivity can be adjusted through the coupled circuit parameters. The directional characteristics of the coupled circuit have been demonstrated in the experiment. The miniature microphone array can localize the sound source with low computational burden by using the intensity difference. This system has significant advantages in various applications where the array size is limited.

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“…In several physical embodiments, the beam is surface-micromachined on silicon, and the back cavity is the open region created by a deep-silicon through-wafer etch process during fabrication of the device. 3,6 The back cavity is enclosed when the silicon die is mounted onto a printed-circuit board. To realize a beam structure that is free to pivot, slits exist around the perimeter of the beam-also labeled in Fig.…”

Section: Introductionmentioning

confidence: 99%

A transmission-line model of back-cavity dynamics for in-plane pressure-differential microphones

Kim

Kuntzman

Hall

2014

The Journal of the Acoustical Society of America

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Pressure-differential microphones inspired by the hearing mechanism of a special parasitoid fly have been described previously. The designs employ a beam structure that rotates about two pivots over an enclosed back volume. The back volume is only partially enclosed due to open slits around the perimeter of the beam. The open slits enable incoming sound waves to affect the pressure profile in the microphone's back volume. The goal of this work is to study the net moment applied to pressure-differential microphones by an incoming sound wave, which in-turn requires modeling the acoustic pressure distribution within the back volume. A lumped-element distributed transmissionline model of the back volume is introduced for this purpose. It is discovered that the net applied moment follows a low-pass filter behavior such that, at frequencies below a corner frequency depending on geometrical parameters of the design, the applied moment is unaffected by the open slits. This is in contrast to the high-pass filter behavior introduced by barometric pressure vents in conventional omnidirectional microphones. The model accurately predicts observed curvature in the frequency response of a prototype pressure-differential microphone 2 mm Â 1 mm Â 0.5 mm in size and employing piezoelectric readout.

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A silicon nitride microphone diaphragm inspired by the ears of the parasitoid fly Ormia ochracea

Cited by 26 publications

References 0 publications

Development of a biologically inspired MEMS microphone

Development of a biologically inspired MEMS microphone

A biomimetic coupled circuit based microphone array for sound source localization

A transmission-line model of back-cavity dynamics for in-plane pressure-differential microphones

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