A method for extracting values of oxide and interface charge from the current-voltage (I-V) characteristics of long-channel MOSFETs is described. The one-dimensional charge-sheet model developed by Brews provides the basis for the I-V characteristics. The I-V characteristics given by this model are optimized with respect to a set of experimental data for an irradiated devrice with the flatband voltage and the mobility the only free parameters. Simple relationships between these parameters and the radiation-induced interface and oxide charge are assumed. perimental I-V data. The fitting parameters are the transistor fiatband voltage and the inversion layer mobility. Section 2 discusses the physical assumptions made in this paper and the link between the fitting parameters and the oxide and interface charge. Section 3 briefly reviews the charge-sheet model developed by Brews.5 Sections 4 and 5 present an application of this method and a comparison of the results to two other methods for extracting oxide and interface charge information from MOSFET I-V characteristics.4'6 2. Physical Assumptions The current-voltage characteristics of a long-channel MOS-FET can be accurately simulated from subthreshold to saturation using the one-dimensional charge-sheet model presented by Brews.5 Accurate input data (e.g., gate length and width, channel doping, oxide thickness, junction lateral diffusion) are required.7 For an irradiated MOSFET in which the electrical properties of the Si-SiO2 interface are altered, the assumption is made that physical parameters of the device such as channel length, oxide thickness, and channel doping are unaffected by radiation exposure and more importantly that these parameters can be measured independently. Using the one-dimensional charge sheet model as a basis for the I-V characteristics of the device, it is possible to vary flatband voltage and mobility to optimize the agreement between the predicted I-V curves and experimental data. This provides a systematic method for obtaining these parameters from the device I-V curves. If simple relationships between the radiation-induced oxide and interface charge and the observed changes in flatband voltage and channel mobility can be assumed, the radiationinduced oxide and interface charge can be extracted from the experimental I-V data.Data presented by Schwank et al.8 show the effects of ionizing radiation and subsequent annealing on threshold voltage and on mobility. These data indicate that the threshold voltage shift due to interface states and the mobility do not recover under annealing at 125°C, whereas the threshold shift due to oxide trapped charge shows considerable recovery. These results infer a relationship between the increase of charge in interface traps due to radiation and the mobility degradation due to radiation. More recent data by Sexton and Schwank9 provide evidence that the change in effective mobility due to a radiation-induced increase in interface traps, 6Nit, can be parameterized as:(1) 1 + a6NitIn this expression,...