A simple out-of-plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing

Terzioğlu, Yunus; Kose, Talha; Azgın, Kıvanç; Akın, Tayfun

doi:10.1109/icsens.2015.7370306

Cited by 10 publications

(5 citation statements)

References 6 publications

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“…Only few designs able to implement a readout system based on capacitors with varying overlap have been proposed so far. In [4], for example, a force rebalance readout is proposed by combining lateral comb fingers electrodes (used for sensing) with a parallel plate capacitor located beneath the proof mass (used to electrostatically pull-down the mass in closed-loop operation). In [5]- [6] zaxis accelerometers with asymmetric vertical comb fingers are presented as valid solution to overcome limitations of parallel-plates based readout schemes.…”

Section: Introductionmentioning

confidence: 99%

High Sensitivity Mems Z-Axis Accelerometer with In-Plane Differential Readout

Zega

Gattere

Riani

et al. 2023

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

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This paper reports the innovative design and a preliminary experimental characterization of a miniaturized z-axis accelerometer. For the first time in a MEMS accelerometer, a motion conversion mechanism is implemented to allow an electrostatic readout based on in-plane comb fingers, thus overcoming the main limitations of out-of-plane parallel plate detection, e.g. nonlinearities, trade-off between sensitivity and full-scale range, pull-in, etc. The first prototype fabricated by exploiting the features of the Thelma-Double fabrication process shows an experimental sensitivity of 12.9 fF/g which agrees well with numerical predictions computed by considering nominal geometric dimension of the sensor.

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Section: Introductionmentioning

confidence: 99%

High Sensitivity Mems Z-Axis Accelerometer with In-Plane Differential Readout

Zega

Gattere

Riani

et al. 2023

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

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“…This work focuses on the first type of sensor with three terminals. They are used, in the case of DCS, for measuring linear displacement and pressure differences [6], and for determining angular position [7,8] and acceleration [9,10]. DRSs are used in applications such as environmental monitoring [11], speed measurement [12], to sense linear or angular position displacement [13], and in rehabilitation devices [14].…”

Section: Introductionmentioning

confidence: 99%

A simple digital readout circuit for differential resistive or capacitive sensors

Hidalgo-López

2023

Meas. Sci. Technol.

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This paper introduces and analyses a novel direct interface circuit (DIC) that directly connects differential resistive and capacitive sensors to digital processors (DPs), performing a magnitude-to-time-to-digital conversion of the information they provide. The simple circuit performs the readout using two passive components, the differential sensor, and the DP. In some cases, the circuit may require an additional passive element. The DP only uses common digital resources such as bidirectional pins or a counter, meaning microcontrollers, FPGAs, or ASICs could all be used as DPs. Different DICs proposed in the literature for reading differential sensors require three time measurement processes to estimate the variable to be measured. The new circuit requires only one, saving time and energy dissipation, and reducing the number of error sources. A design based on an FPGA has been implemented as a proof of concept. Measurement times in the order of 1.1–1.3 ms have been obtained with this configuration. Errors in the readout of a differential resistive sensor are below 0.34% in the worst case and below 0.63% for a differential capacitive sensor.

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“…In this scheme, reduced spring rigidity results low operating frequency and dynamic range of the sensor. (Terzioglu et al 2015) Introduced a one-axis comb-like accelerometer. However, this accelerometer was limited to measure acceleration in a single axis direction and was thus inappropriate for applications that would require acceleration measurements in two or three axes directions.…”

Section: Introductionmentioning

confidence: 99%

A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

2020

Informacije MIDEM

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In this paper a three-axis capacitor accelerometer has been designed, analyzed and optimized using microelectromechanical systems technology. The accelerometers are generally divided into three categories of single axis, two axes, and three axes in terms of their ability to measure acceleration. In the suggested structure, acceleration measurements are carried out on all three axes simultaneously using a mass and spring system, which makes it possible to achieve a high sensitivity at a low occupancy level without losing other accelerator factors. By taking difference in this structure, it is shown that each axis acceleration has a very low impact on the measured acceleration of the other two axes. If any external factor changes the value of a single capacitor, the original output of the capacitor does not change for detecting acceleration. In other words, the acceleration of any of these three axes, due to its designing features, does not influence the other two axes and the system performance cannot be disrupted by external factors. The other important characteristics of the accelerometers are dynamic range, operating frequency and sensitivity. This study covers a dynamic range up to 1000g and an operating frequency up to 20 kHz. The accelerometer sensitivity is 4 fF/g in the z axis direction while it is 9 fF/g in the x and y axes directions. In this paper, the simulation of the structure is performed using Intellisuite software. Moreover, a multi-objective genetic optimization algorithm has been used to determine the dimensions of the constituents of the spring and the weight.

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A simple out-of-plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing

Cited by 10 publications

References 6 publications

High Sensitivity Mems Z-Axis Accelerometer with In-Plane Differential Readout

High Sensitivity Mems Z-Axis Accelerometer with In-Plane Differential Readout

A simple digital readout circuit for differential resistive or capacitive sensors

A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

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