A Simplified Inchworm Rotary Piezoelectric Actuator Inspired by Finger Twist: Design, Modeling, and Experimental Evaluation

Spieth, Patrick; Liu, Junkao; Deng, Jie; Chang, Qingbing; Liu, Yingxiang

doi:10.1109/tie.2023.3237900

Cited by 35 publications

(9 citation statements)

References 41 publications

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“…In order to improve motion ranges of the direct deformation type MPRs, various flexible displacement amplification mechanisms (FDAMs) are combined with the piezoelectric actuating elements to amplify their direct deformations, as shown in Figure 7e, and the FDAMs can be divided into the lever type ones, the bridge type ones and the hybrid type ones. [ 176–179 ] Ma et al [ 180 ] proposed a crab‐like clamp MPR with a hybrid type FDAM, as illustrated in Figure 7f; the mobile unit was directly actuated by a piezoelectric stack, and the motion range was enlarged by nearly nine times by using the hybrid type FDAM. York et al [ 181 ] presented an ultra‐thin clamp MPR with a bridge type FDAM, as plotted in Figure 7g; the clamp was directly driven by a piezoelectric bimorph beam, and the clamp opening range was amplified to 106 µm.…”

Section: Mprs With Different Working Principlesmentioning

confidence: 99%

Section: Mprs With Different Working Principlesmentioning

confidence: 99%

“…As shown in Figure 8 a , the inchworm driving type MPRs, inspired by the crawl motion of inchworm, usually have three groups of piezoelectric actuating elements (two clamping units and an actuating unit) to perform clamping and actuating motions, respectively; then, periodic stepping movements are achieved through the coordination of the clamping and actuating units. [ 183 , 184 ] Deng et al [ 185 ] designed an inchworm driving type MPR shown in Figure 8b , a three‐jaw type clamping mechanism including three piezoelectric stacks was developed to perform the clamping motion, and a linear movement was realized. Kim and Lee [ 186 ] proposed an inchworm MPR with three unique oval‐shaped shell structures, as shown in Figure 8c ; each shell structure was driven by a piezoelectric stack and could play the roles of clamping and actuating motions.…”

Section: Mprs With Different Working Principlesmentioning

confidence: 99%

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Developments and Challenges of Miniature Piezoelectric Robots: A Review

Li,

Deng,

Zhang

et al. 2023

Advanced Science

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Miniature robots have been widely studied and applied in the fields of search and rescue, reconnaissance, micromanipulation, and even the interior of the human body benefiting from their highlight features of small size, light weight, and agile movement. With the development of new smart materials, many functional actuating elements have been proposed to construct miniature robots. Compared with other actuating elements, piezoelectric actuating elements have the advantages of compact structure, high power density, fast response, high resolution, and no electromagnetic interference, which make them greatly suitable for actuating miniature robots, and capture the attentions and favor of numerous scholars. In this paper, a comprehensive review of recent developments in miniature piezoelectric robots (MPRs) is provided. The MPRs are classified and summarized in detail from three aspects of operating environment, structure of piezoelectric actuating element, and working principle. In addition, new manufacturing methods and piezoelectric materials in MPRs, as well as the application situations, are sorted out and outlined. Finally, the challenges and future trends of MPRs are evaluated and discussed. It is hoped that this review will be of great assistance for determining appropriate designs and guiding future developments of MPRs, and provide a destination board to the researchers interested in MPRs.

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Section: Mprs With Different Working Principlesmentioning

confidence: 99%

Section: Mprs With Different Working Principlesmentioning

confidence: 99%

Section: Mprs With Different Working Principlesmentioning

confidence: 99%

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Developments and Challenges of Miniature Piezoelectric Robots: A Review

Li,

Deng,

Zhang

et al. 2023

Advanced Science

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“…Consequently, the micro/nano platform with ability of precise positioning in a wide range is the key device in large-scale machining systems [19,20]. Although numerous works have concentrated on research of the piezoelectric stage [21][22][23][24][25][26], precise trajectory tracking in a wide range remains a challenging issue.…”

Section: Introductionmentioning

confidence: 99%

Implementation of cross-scale plane micro-scratching process driven by hybrid piezoelectric actuation

Sun

Deng

et al. 2023

Smart Mater. Struct.

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The atomic force microscope (AFM) tip-based mechanical machining technique has been used to fabricate complex micro-structures successfully. However, the machining scope and depth are limited, which holds back this technique severely. This work presents the design and evaluation of a piezoelectric manufacturing system (PMS) for implementation of cross-scale (large scale and high resolution) plane micro-scratching. The PMS has the two-dimensional (2D) micro-machining ability with depths up to 0.98 μm in the millimeter machining scope through the combination of a travel range XY positioning stage and a three-degree-of-freedom (3-DOF) sandwich piezoelectric manipulator. The tracing property of the PMS is feasible for large scale machining by controlling the multi-axis cooperative motion of the 2-DOF stage. The experiments show that the micro-triangles and micro-circles arrays with dimensions from 40 μm to 400 μm are machined successfully. The deviations of the position determination and machined depths for all the micro-structures are less than 5%. Further, it is verified that the manipulator has potential to be used in vibration-assisted cutting to improve machining quality. To sum up, the PMS shows great prospects in the applications of machining cross-scale and large depth planar micro-structures.

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“…Nonresonant-type piezoelectric motors, which are commonly used as micro manipulators, deal with the accurate positioning tasks. There are four main nonresonant-type motors, comprising the direct drive type [32][33][34][35], the inertial type [13,16,36], the stick-slip type [37][38][39][40], and the inchworm type [41][42][43][44]. These motors commonly use flexure hinge mechanisms and multilayer lead zirconate titanate (PZT) ceramics [45] to produce the desired vibrations at the contact interface to drive the end effector.…”

Section: Introductionmentioning

confidence: 99%

A novel three-phase excitation piezoelectric motor for macro-micro actuation: integration design, systematic modeling, and experimental evaluation

Qiu

Jin

Wang

et al. 2023

Smart Mater. Struct.

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Macro-micro actuators require complex feedback control systems to obtain high positioning cooperativeness. However, the mechanical connections of macro-micro actuators are generally redundant in terms of their size, which is highly unfavorable for both miniaturization and integration. This paper presents an approach to address this problem based on a novel integration design for a three-phase excitation piezoelectric motor (TPM) that is capable of performing macro-micro actuation by switching its operating mode from resonant to nonresonant. The load capacity of the proposed TPM can reach 0.39 Nm with a maximum speed of 3.82 rad/s (36.5 rpm). This performance is achieved by using a unique triangular flexible stator that contains three piezoelectric stack actuators (PSAs) acting as vibrators and is excited by a three-phase electrical signal. A time-domain electromechanical coupling dynamic model is developed to determine the dynamic behavior of the proposed motor, and the modeling results are validated successfully by experimental results obtained from a fabricated prototype. The proposed motor is expected to be helpful for integration design of piezoelectric devices that require macro-micro actuation.

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A Simplified Inchworm Rotary Piezoelectric Actuator Inspired by Finger Twist: Design, Modeling, and Experimental Evaluation

Cited by 35 publications

References 41 publications

Developments and Challenges of Miniature Piezoelectric Robots: A Review

Developments and Challenges of Miniature Piezoelectric Robots: A Review

Implementation of cross-scale plane micro-scratching process driven by hybrid piezoelectric actuation

A novel three-phase excitation piezoelectric motor for macro-micro actuation: integration design, systematic modeling, and experimental evaluation

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