2023
DOI: 10.1109/ted.2023.3238393
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A Simulation Study of SiGe Shell Channel CFET for Sub-2-nm Technology Nodes

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Cited by 3 publications
(1 citation statement)
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“…However, semiconductor device scaling degrades the performance due to short-channel effects and band-to-band tunneling. To overcome these issues, vertical nanosheet FETs are promising candidates for next-generation logic, memory applications, artificial synapses, and neurons. While this work focuses on optimizing the device design through simulation for synapse applications, it is possible to develop a practical process architecture based on previous studies. The engineered vertically stacked nanosheet can be fabricated through monolithic integration of a 3D field-effect transistor. …”
Section: Introductionmentioning
confidence: 99%
“…However, semiconductor device scaling degrades the performance due to short-channel effects and band-to-band tunneling. To overcome these issues, vertical nanosheet FETs are promising candidates for next-generation logic, memory applications, artificial synapses, and neurons. While this work focuses on optimizing the device design through simulation for synapse applications, it is possible to develop a practical process architecture based on previous studies. The engineered vertically stacked nanosheet can be fabricated through monolithic integration of a 3D field-effect transistor. …”
Section: Introductionmentioning
confidence: 99%