A Single-Chip Optical Phased Array in a Wafer-Scale Silicon Photonics/CMOS 3D-Integration Platform

Kim, Tae-hwan; Bhargava, Pavan; Poulton, Christopher V.; Notaros, Jelena; Yaacobi, Ami; Timurdogan, Erman; Baiocco, Christopher; Fahrenkopf, Nicholas M.; Kruger, Seth; Ngai, T.; Timalsina, Yukta P.; Watts, Michael R.; Stojanović, Vladimir

doi:10.1109/jssc.2019.2934601

Cited by 141 publications

(90 citation statements)

References 34 publications

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“…Finally, phase-shift can be implemented in Si using EO and TO effects, whereas in SiN the TO efficiency has about one order of magnitude lower power efficiency than in Si [137]- [138]. Recent works have also proposed highly customizable photonics processes, where Si and SiN elements can be combined to achieve optimized beam steering [139].…”

Section: A Silicon Versus Silicon Nitridementioning

confidence: 99%

“…Another key challenge for SiPho is the integration of the photonic circuitry with the driving electronics, either through heterogeneous or monolithic integration. This aspect is pivotal for OPA-LiDAR as well, as electric signals will be used to drive it and will be needed as sensor output; for this reason, in the last few years, several works have been focusing on combining on a single chip all the LiDAR electronics and photonics components [126], [131], [139], [152]. Monolithic integration is one of the techniques that can combine electronics and photonics [126], however CMOS design rules limits the photonics circuit design and ultimately the OPA performance.…”

Section: Integration With Driving Electronicsmentioning

confidence: 99%

See 1 more Smart Citation

A Review and Perspective on Optical Phased Array for Automotive LiDAR

Hsu

Solano-Rivas

et al. 2021

IEEE J. Select. Topics Quantum Electron.

193

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Section: A Silicon Versus Silicon Nitridementioning

confidence: 99%

Section: Integration With Driving Electronicsmentioning

confidence: 99%

A Review and Perspective on Optical Phased Array for Automotive LiDAR

Hsu

Solano-Rivas

et al. 2021

IEEE J. Select. Topics Quantum Electron.

193

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“…2D OPAs increase the attraction but simultaneously with the challenges of OPAs [4]. Therefore, 1D OPAs, consisting of waveguide gratings, have been employed as a practical solution [5]. In this scheme, the  sweep is necessary, and therefore, the steering range in the direction along the waveguides is limited.…”

Section: Manuscript Receivedmentioning

confidence: 99%

Thermo-Optic Beam Scanner Employing Silicon Photonic Crystal Slow-Light Waveguides

Tamanuki

Ito

Baba

2021

J. Lightwave Technol.

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Abstract-Optical beam scanning is a widely utilized function in optical systems, and a compact nonmechanical solid-state device has long been anticipated. Here, we have studied such a device consisting of photonic crystal slow-light waveguides and switch trees, fabricated by a Si photonics process, employing a bespoke prism lens for beam collimation. Further in this study, we particularly demonstrated the operation of the device only by the thermo-optic (TO) tuning of its components, at a fixed wavelength of light. A spot beam of ~0.1° divergence, was scanned in two dimensions, in the angular range of 40°  8.8° and average power consumption of ˂ 0.7 W. Neglecting some disordered beams caused by the non-uniformity of the fabricated device, the estimated number of resolution points was 400  32 = 12,800, which required a significant effort in the device fabrication and calibration, utilizing optical-phased arrays, if the same performance was targeted.

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“…Integrated optical phased arrays (OPAs) [1][2][3][4][5][6][7][8][9][10][11][12][13], inspired by phased-array radars, perform versatile beamsteering, such as random-access pointing and focusing on regions of interest, as well as sequential scanning. They are suitable for applications such as LiDAR [3][4][5][6][7][8][9][10][11][12][13], image projection [3,[14][15][16] and optical communication [12,17,18]. In contrast to mechanical scanning, OPAs have the additional advantage of being compact and capable of high-speed response, allowing their functionality to be adapted to other systems such as 2D image sensors.…”

Section: Main Textmentioning

confidence: 99%

“…Integrated OPAs based on silicon photonics technology are being actively developed. While 1D-OPAs allow wide-angle beam steering in one-dimension, scanning in the second dimension has been usually achieved with widely tunable lasers [5][6][7][8][9]13]. Single wavelength beam-steering in two-dimensions is naturally achieved by 2D-OPAs with a variable phase in each pixel [2,3,12].…”

Section: Main Textmentioning

confidence: 99%

On-chip 2D beam-steering with a liquid-crystal-tunable optical phased array

Nakamura¹,

Hashiya²,

Nomura³

et al. 2020

Preprint

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Optical phased arrays (OPAs) with the ability of dynamic beam-steering hold great promise for industrial applications. Although they potentially offer high-resolution, high-speed and wide-angle beam-steering, 2D beam-steering has only been achieved by 1D OPAs with wavelength-tuning or by 2D OPAs containing enormous numbers of elements, thereby significantly increasing the system complexity and power consumption. Here we demonstrate a liquid-crystal-tunable Bragg-reflector waveguide outcoupler integrated with a 1D OPA. The output beam angle is controlled by an electric-field applied to the liquid crystal between the Bragg-mirrors, independently from steering along a second axis with the OPA. Our proof-of-concept demonstration with an 8-channel OPA shows 2D beam-steering with a 16° × 15° field-of-view and 12 ms × 14 μs time-response. Our approach opens a practical way for scalable OPAs capable of single wavelength 2D beam-steering, as well as demonstrating a strategy for the integration of liquid crystal materials with silicon photonics.

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A Single-Chip Optical Phased Array in a Wafer-Scale Silicon Photonics/CMOS 3D-Integration Platform

Cited by 141 publications

References 34 publications

A Review and Perspective on Optical Phased Array for Automotive LiDAR

A Review and Perspective on Optical Phased Array for Automotive LiDAR

Thermo-Optic Beam Scanner Employing Silicon Photonic Crystal Slow-Light Waveguides

On-chip 2D beam-steering with a liquid-crystal-tunable optical phased array

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