A single-mask thermal displacement sensor in MEMS

Krijnen, B.; Hogervorst, R.P.; Dijk, Jan-Willem van; Engelen, Johannes Bernardus Charles; Woldering, L.A.; Brouwer, Dannis Michel; Abelmann, Léon; Soemers, Herman

doi:10.1088/0960-1317/21/7/074007

Cited by 28 publications

(33 citation statements)

References 23 publications

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“…The CV mode is widely reported in the literature. However, the study reported in [3] indicated that the CC excitation leads to a higher sensitivity. Achieving higher resolution is critical for MEMS displacement sensors.…”

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confidence: 94%

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A Comparison of Two Excitation Modes for MEMS Electrothermal Displacement Sensors

Mohammadi

Moheimani

Yuce

2014

IEEE Electron Device Lett.

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Abstract-MEMS electrothermal displacement sensors can be operated in constant current (CC) or constant voltage (CV) excitation modes. The CV mode is more commonly used. However, there have been reports that the CC excitation mode may lead to a larger measured signal, and thus, it may be a better choice than the CV mode. In this letter, we present an analytic comparison of the two methods, and show that from a signalto-noise-ratio point of view, benefits of operating a sensor in CC mode are only marginal. The analytical investigation is supported by experiments performed on sensors integrated in a SOI-MEMS nanopositioner with low noise read out circuits, which leads to 0.04-nm/ √ H z displacement resolution for both excitation modes.Index Terms-Micro-electromechancial systems (MEMS), electrothermal sensor, noise.

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confidence: 94%

“…In order to heat up the resistors, electrical power is delivered either by a constant current (CC) [3] or a constant voltage (CV) source [4]. The CV mode is widely reported in the literature.…”

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confidence: 99%

A Comparison of Two Excitation Modes for MEMS Electrothermal Displacement Sensors

Mohammadi

Moheimani

Yuce

2014

IEEE Electron Device Lett.

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“…In a first production run a proof of the sensor principle was given [48,72]. In this production run a SOI wafer with device layer 25 ñm, oxide layer 1 ñm and doping concentration 4.7 × 10 18 cm −3 was used.…”

Section: Designmentioning

confidence: 99%

“…The stage is suspended by folded flexures to constrain the movement of the stage to a straight line and to prevent the stage from pull-in due to lateral forces generated by the electrostatic actuators [124,80]. Feedback is provided by a thermal displacement sensor that we have published before [73]. Each sensor consists of two silicon heaters that are resistively heated by applying a fixed voltage.…”

Section: Introductionmentioning

confidence: 99%

“…The decreasing thermal conductivity of air as a function of the pressure with characteristic dimensions of several micrometers is used, for example, in Pirani gauges [37,4,117]. Thermal sensors for measuring the position of a MEMS stage have been reported before, but their vacuum behavior is not mentioned [78,26,105,73]. Although many actuated MEMS stages have been reported with integrated sensors, only a few have been actually used for control, for example [22,18,53,101].…”

Section: Introductionmentioning

confidence: 99%

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A large-stroke planar MEMS-based stage with integrated feedback

Krijnen¹

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Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface

et al. 2018

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This paper presents a design and testing of a micro-thermal sensor probe for realizing the proposed concept of non-contact surface defect detection, in which a change in heat flow across the gap between the tip of the micro-thermal sensor probe and a target surface is utilized to recognize the existences of surface defects. In the proposed concept of surface defect detection, the probe tip, where the micro-thermal sensor is embedded, is required to be placed as close as possible to the target surface for highly sensitive surface defect detection. For the purpose, an optical tilt detection assembly based on the laser autocollimation is designed to detect relative tilt of the micro-thermal sensor with respect to a target surface. A sensor probe assembly, in which the fabricated micro-thermal sensor is embedded to the tip of a hollow-shaped piezoelectric actuator by using a homemade sensor mount, is also designed in such a way that the sensor element will face to a target surface. A prototype micro-thermal sensor probe is constructed by integrating the optical tilt detection assembly and the sensor probe assembly, and some experiments have been carried out to verify the basic performances of the prototype micro-thermal sensor probe.

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A single-mask thermal displacement sensor in MEMS

Abstract: Position sensing in MEMS is often based on the principle of varying capacitance [1].Alternative position sensing principles include using integrated optical waveguides

Cited by 28 publications

References 23 publications

A Comparison of Two Excitation Modes for MEMS Electrothermal Displacement Sensors

A Comparison of Two Excitation Modes for MEMS Electrothermal Displacement Sensors

A large-stroke planar MEMS-based stage with integrated feedback

Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface

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