2016 Ieee Sensors 2016
DOI: 10.1109/icsens.2016.7808711
|View full text |Cite
|
Sign up to set email alerts
|

A single-mass self-resonating closed-loop capacitive MEMS accelerometer

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

0
5
0

Year Published

2020
2020
2023
2023

Publication Types

Select...
4
2
1
1

Relationship

0
8

Authors

Journals

citations
Cited by 13 publications
(5 citation statements)
references
References 4 publications
0
5
0
Order By: Relevance
“…The accelerometer behaviour can be assimilated to a displaced mass on a string, whereupon movement, it experiences a change in status, and the corresponding acceleration is estimated by the displacement of the string [14]. In the commercial market, piezoresistive, piezoelectric, and capacitive components are used to convert the mechanical displacement into an electric voltage [15].…”
Section: Wearable Sensors: Basic Informationmentioning
confidence: 99%
“…The accelerometer behaviour can be assimilated to a displaced mass on a string, whereupon movement, it experiences a change in status, and the corresponding acceleration is estimated by the displacement of the string [14]. In the commercial market, piezoresistive, piezoelectric, and capacitive components are used to convert the mechanical displacement into an electric voltage [15].…”
Section: Wearable Sensors: Basic Informationmentioning
confidence: 99%
“…This work focuses on the first type of sensor with three terminals. They are used, in the case of DCS, for measuring linear displacement and pressure differences [6], and for determining angular position [7,8] and acceleration [9,10]. DRSs are used in applications such as environmental monitoring [11], speed measurement [12], to sense linear or angular position displacement [13], and in rehabilitation devices [14].…”
Section: Introductionmentioning
confidence: 99%
“…Several works were conducted in order to improve the physical characteristics and the performances of the capacitive sensor [3][4][5][6][7][8]. In this work, the modeling of the capacitive detection sensor aims to extract the formulas for acceleration and measurement error.…”
Section: Introductionmentioning
confidence: 99%