We fabricated self-aligned coplanar amorphous indium-gallium-zinc-oxide (a-IGZO) TFTs and defined the source/drain region using deep ultraviolet (DUV) irradiation. For our TFTs, source/drain region were well defined to designed dimensions and contact resistance was low value. The electrical properties of the device show field-effect mobility (μ FE ) of 13.2 cm 2 /Vs, subthreshold swing (S/S) of 0.32 V/decade, threshold voltage (V th ) of 3.2 V, and on/off ratio of 8.8 × 10 8 , respectively. In addition, the reduced channel length ( L) and width-normalized contact resistance (R SD W) were 1.08 μm and 87.5 cm, respectively. Stability behavior of self-aligned coplanar a-IGZO TFT fabricated by DUV irradiation was investigated under negative bias stress (NBS), negative bias illumination stress (NBIS), positive bias stress (PBS), and positive bias temperature stress (PBTS). After the stress under NBS, NBIS, PBS, and PBTS, the V th values of −0.3 V, −0.8 V, 1.2 V, and 1.3 V were measured, respectively. Additionally, the electrical characteristics of the n+ doping region by DUV irradiation were not degraded under any of the stress conditions. © The Author Amorphous oxide semiconductors (AOS) have been intensively studied as promising materials for active layer of thin film transistors (TFTs) because of their low off-current, high mobility, and good switching properties compared to amorphous silicon (a-Si)-based TFTs. Among the many oxide TFTs, amorphous In-Ga-Zn-O (a-IGZO) TFTs have been commercialized as backplanes of organic light emission display (OLED) TVs due to their high mobility.
1,2Oxide TFTs with conventional bottom-gate structures such as back channel etch (BCE) and etch-stopper layer (ESL) structure have been widely applied in display back-plane. However, these structures have high parasitic capacitance induced by overlap between gate and source/drain electrodes.3 This parasitic capacitance can generate a voltage drop, which results in brightness non-uniformity, flickering, and image lagging in flat panel displays (FPDs). Self-aligned coplanar structured TFTs are candidate next-generation FPDs because overlap between gate and source/drain electrodes can be minimized, reducing parasitic capacitance. 4,5 In previous research, we reported selfaligned coplanar a-IGZO top gate TFTs with various DUV irradiation energies. 6 The n+ doping techniques using DUV irradiation is a very simple process. In addition, the self-aligned coplanar TFTs fabricated by DUV irradiation have attractive results for reduced channel length ( L) and width-normalized contact resistance (R SD W) compared to other n+ doping methods. [6][7][8][9] We observed that the electrical properties of n+ regions were stable at elevated temperatures. However, to use these self-aligned TFTs fabricated by DUV irradiation as back planes for OLEDs, the behavior of TFT stability under various stress conditions needs to be studied. In a self-aligned coplanar structure, the electrical characteristics of the n+ doping region formed by diffusion of hydrogen or/...