Energy harvesting technologies are attracting attention because they remove power supply lines and charging. However, energy harvesting has many problems such as small power generation and instability, and low output voltage. As a step toward putting this attractive technology to practical use, I have developed a CMOS temperature sensor with on‐chip photovoltaic cells. The photovoltaic cells achieved an open circuit voltage of 0.97 V, a short‐circuit current of 8.0 μA, and a maximum power generation of 6.5 μW in an area of 800 μm square. Experiments have shown that the prototype CMOS temperature sensor can operate without external power supply. © 2022 Institute of Electrical Engineers of Japan. Published by Wiley Periodicals LLC.