A sputtered neutral mass spectrometer with high current, low energy ion bombardment

Kato, Shigekí; Hamagaki, Manabu; Hara, Tamio; Aoyagi, Kenji; Namba, Susumu; Hayashi, Shinji; Yashiro, Hidehiko

doi:10.1016/0168-583x(88)90329-1

Cited by 13 publications

(4 citation statements)

References 5 publications

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“…Electron-beam postionization has also been utilized to enhance ionization efficiency. Direct ionization, by an electron beam directed through the sputtered flux or by the use of a low-pressure plasma, , has been accomplished and configured for imaging experiments. The sensitivity of these measurements is compared in terms of the useful yield, defined as the ratio of detected ions to sputtered atoms.…”

Section: Postionization and Sensitivity Enhancementmentioning

confidence: 99%

Imaging with Mass Spectrometry

1999

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Section: Postionization and Sensitivity Enhancementmentioning

confidence: 99%

Imaging with Mass Spectrometry

1999

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“…In some applications, the fast beam component may contribute significantly to the total ionization rate. In EBE plasma discharges [10,11], where the beam energy E b is close to that corresponding to the maximum in the ionization cross section of the neutral gas (for example E b ≈ 100 eV in Ar), the beam is almost totally responsible for sustaining the plasma against losses. At these energies, and for low-temperature backgrounds (T e = 2-10 eV), a ratio p = ν bp /ν ep > 10-100 may be attained.…”

Section: The Effect Of Ionization By the Beam Electronsmentioning

confidence: 99%

“…Here electrons can gain significant translational energy from their acceleration across the potential step, resulting in a bulk electron drift. One type of plasma device that exploits the presence of 'double layer-accelerated' electrons is the DC electron-beam-excited (EBE) plasma sources developed in Japan for sputtering and etching applications [10]. The beam electrons of typical energy 60-150 eV, guided by a linear magnetic field, sustain a secondary, highdensity discharge, N e 10 17 m −3 ; the remnant of the electron beam at the substrate (relative density N b /N e 0.1) sinks the surface potential below values normally attained in purely thermal electron plasmas.…”

Section: Introductionmentioning

confidence: 99%

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A fluid model of the edge plasma in low-temperature discharges containing beam electrons

Bradley

1996

J. Phys. D: Appl. Phys.

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The influence of mono-energetic beam electrons on the behaviour of a plane plasma boundary is investigated assuming that the ion, electron and beam electron components in the pre-sheath act as three coupled fluids. The sheath edge is identified by the singularity in the electric field appearing under the quasi-neutral assumption, and the Bohm criterion is solved for a range of beam and plasma parameters. Collisions between the plasma particles and the neutral species are considered in a regime in which Coulomb interactions are unimportant. The plasma is generated by beam and thermal electron impact ionization of the neutral gas. Under collision-free conditions, sheath-edge potentials and ion energies are found to increase with the ratio of beam to thermal electron density, up to a critical ratio of about 0.3, above which no sheath edge is predicted to exist. Ion - neutral species collisions further raise the Bohm speed; however, the attenuation of the electron beam through scattering and ionization does not appreciably alter the sheath-edge conditions, but changes the width of the boundary layer. The results of this model, which are relevant to industrial plasma discharges containing beam electrons, are compared with those found from other treatments of the beam - plasma boundary.

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Surface analysis by sputtered neutral mass spectrometry with electron‐beam‐excited plasma

Hashiguchi

Hayashi

Ohtsubo

et al. 1989

Surface & Interface Analysis

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A new type of sputtered neutral mass spectrometer, named SNART (Sputtered Neutral Analysis-Riken Type), was evaluated. SNART uses an argon plasma that is driven by an electron beam. The plasma is used for both sputtering of the sample and post-ionizing the sputtered neutral atoms. A depth profile of multilayered Ge/Si was taken by SNART to evaluate depth resolution. The quantitativeness of SNART was also checked using a stainlesssteel sample. The results were compared with those by conventional SIMS and glow discharge optical emission spectrometry. The following features of SNART were confirmed: (1) high post-ionization efficiency; (2) high depth resolution; (3) high sputtering rate; (4) no matrix effect on post-ionization efficiency; and (5) high quantitativeness

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A sputtered neutral mass spectrometer with high current, low energy ion bombardment

Cited by 13 publications

References 5 publications

Imaging with Mass Spectrometry

Imaging with Mass Spectrometry

A fluid model of the edge plasma in low-temperature discharges containing beam electrons

Surface analysis by sputtered neutral mass spectrometry with electron‐beam‐excited plasma

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