A state-of-art review and a simple meta-analysis on deterministic scheduling of diffusion furnaces in semiconductor manufacturing

Rani, M. Vimala; Mathirajan, M.

doi:10.1080/00207543.2022.2102449

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A state-of-art review and a simple meta-analysis on deterministic scheduling of diffusion furnaces in semiconductor manufacturing

Cited by 2 publications

References 73 publications

Population-based iterated local search for batch scheduling on parallel machines with incompatible job families, release dates, and tardiness penalties

Population-based iterated local search for batch scheduling on parallel machines with incompatible job families, release dates, and tardiness penalties

Deploying an Advanced Scheduling Solution to Optimize Conflicting KPIs in the Diffusion Area at Renesas Electronics

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