“…Both drift and spatial distortion functions are assumed to have pre-defined forms. Using these functional forms, the distorted positions of a finite number of locations, (x,y) k , are determined for each image n. The process is repeated at N times, so that the distorted positions (x,y) kn , k=1,2,…,K, n=1,2,…,N, are determined 9 . This data forms the basis for the simulation process, with the long term goal of demonstrating the accuracy and robustness of the approach for SEM image analysis.…”