“…[8][9][10][11][12][13][14] In MLCCs, previous macroscopic measurements have clearly demonstrated the role of oxygen vacancies in the degradation failure of MLCCs; recent work turns to scanning probe microscopy for understanding local insulation resistance degradation of MLCCs, especially Kelvin probe force microscopy, which can give high-spatial-resolution surface potential measurements, providing information about the electric field concentrated distribution of degraded dielectric layers. [15][16][17][18][19][20][21][22][23][24] However, for the dielectric breakdown conductive path and its dynamics under electric fields, it is still in the frame of theoretical modeling process, and few studies have been done in the direct imaging of the local conductive path, [25] and their dynamics in response to the loading fields, which gives a great limitation to understanding local degradation mechanism for MLCCs' failure. [26][27][28] Here, considering the difference of thermal conductivity between local dielectric layer (lower thermal conductive, insulatelike phase) and local conductive path (higher thermal conductive, metal-like phase), we proposed scanning thermal microscopy, a powerful tool for local thermal physics characterization, [29][30][31][32][33][34][35][36] to perform direct imaging of the degraded MLCCs by the highly accelerated life test (HALT) method, and successfully obtained local dielectric conductive paths and their electrical tree dynamic behaviors under the dc bias on and off state.…”