2008
DOI: 10.1016/j.jcis.2007.08.003
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A study of atmospheric-pressure CHF3/Ar plasma treatment on dielectric characteristics of polyimide films

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Cited by 19 publications
(9 citation statements)
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“…We have observed small decrease (∼ 2%) in dielectric constant of the films with increasing frequency. This is in good agreement with other works 19, 26. For polar polymers the dielectric constant increases with increasing temperature.…”
Section: Resultssupporting
confidence: 93%
“…We have observed small decrease (∼ 2%) in dielectric constant of the films with increasing frequency. This is in good agreement with other works 19, 26. For polar polymers the dielectric constant increases with increasing temperature.…”
Section: Resultssupporting
confidence: 93%
“…Films are cast, and then they are thermally dehydrated to produce the final imide form (11). They are distinguished from other highperformance polymers by the solubility of their poly (amic acid) precursor form, which can be cast into uniform films and quantitatively converted to polyimide (12). Multifarious types of polyimides which are used for adhesives, including polycondensation PI, thermoplastic PI, siloxaneblock co-polyimide, polyamide-imide, norbornene anhydride and its monoester capped PI, acetylene capped PI and BMI, and so forth.…”
Section: Introductionmentioning
confidence: 99%
“…Measurements of the dielectric constant at 1 MHz showed that at 25°C its value gradually decreases depending on the power from 3.15 for the initial film to 2.45 for the film treated at 400 W. There was also an increase in ε' by 0. studies with varying the frequency in the range of 100 to 10 7 Hz and the temperature in the range of 0-200°С at a frequency of 10 3 Hz showed that ε' is reduced (within 5%) by increasing frequency and increases at a constant frequency with an increase in the temperature [17].…”
mentioning
confidence: 97%
“…However, studies of this sort were carried out for other polymers, such as Kapton H [16,17], fluori nated poly(arylene oxide) and a divinylsiloxane-ben zocyclobutane copolymer [18], and Parylene C [19].…”
mentioning
confidence: 99%