1999
DOI: 10.1016/s0257-8972(99)00152-8
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A study of defects in ultra-thin transparent coatings on polymers

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Cited by 90 publications
(41 citation statements)
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“…The defects may be related to surface roughness as discussed for the copper substrates or caused by particle contamination on the original substrate. The particles may act as a mask to prevent the deposition of the ALD film [10,24,25]. The particles may then be displaced to yield a pinhole defect.…”
Section: Contents Lists Available At Sciencedirectmentioning
confidence: 99%
“…The defects may be related to surface roughness as discussed for the copper substrates or caused by particle contamination on the original substrate. The particles may act as a mask to prevent the deposition of the ALD film [10,24,25]. The particles may then be displaced to yield a pinhole defect.…”
Section: Contents Lists Available At Sciencedirectmentioning
confidence: 99%
“…It can be seen that near the so-called critical thickness, d C (here about 15 nm) the OTR drops drastically, yet cannot be improved significantly by further increasing the thickness. It has been observed that nanometersize structural defects present in the barrier coating, which are mainly caused by intrinsic or extrinsic surface roughness [25] account for this limited performance of single-layer gas barrier.…”
Section: Thin Film Gas Barriers On Polymersmentioning
confidence: 99%
“…In a previous study, Chatham 3 measured coating thicknesses by X-ray fluorescence, calibrated by chemical analysis, multiple beam interferometry, electrical resistance measurements, and X-ray diffraction line broadening. In the present work, three coated films have been investigated by different methods, i.e.…”
Section: Aluminum Thicknessmentioning
confidence: 99%
“…Figure 13(a) shows a strong decrease of permeance with aluminum thickness to about 40 nm, then a constant residual permeation is observed. The literature 3 report that a residual permeation exist even when the barrier inorganic coatings are relatively thick (¼70 nm); Sobrinho et al 3 attribute this phenomenon to the presence of microscopic defects in the SiO 2 or SiN coatings. Bonnebat 20 indicates a residual permeation to water vapor [$1.2 Â 10 À9 kg/(m 2 s)] for PET metallized with aluminum for an optical density (OD) of 3.5 which corresponds to 54 nm.…”
Section: Permeabilitymentioning
confidence: 99%
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