2009
DOI: 10.5757/jkvs.2009.18.6.403
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A Study of Non-uniform Pressure Distribution in Vacuum Chamber during Dynamic Gas Flow

Abstract: Vacuum chambers have wide application for a variety of purposes such as material processing, vacuum gauge calibration, etc. As the dynamic pressure generated in such chamber is non-uniform, in many industrial as well as research processes, it is vital to know the non-uniform gas distribution with associated gas flow regimes and the ways of minimizing these pressure non-uniformities. In the present work, the behavior of gas flow in a vacuum chamber, during continuous gas flow, is described in the pressure range… Show more

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