A study of the characteristics of a one-degree-of-freedom positioning device using spring-mounted piezoelectric actuators

Abstract

This article presents the actuating performance of a one-degree-of-freedom (DOF) positioning device using spring-mounted piezoelectric (PZT) actuators. To employ a spring with a preset compression, the operational range of a PZT actuator could be simply enlarged, and a sliding table actuated by PZT impact force might feature long stroke and high-precision positioning ability. An experimental set-up consisting of two spring-mounted PZT actuators was configured to examine the actuating characteristics. According to experimental results, a sliding table with a heavy mass of 172 g could be actuated to move with a step motion ranging from 15 nm to 81 µm by only one single actuation of the PZT actuator, and with a maximum travelling speed of 3.47 mm/s by continuous actuation. In addition to experimental examinations, a dynamic model was established and verified as effective in describing the actuating behaviours through numerical examinations.

Dynamics of the Vibro-Impact Nonlinear Damped and Forced Oscillator under the Influence of the Electromagnetic Actuation

“…Liu and Wang [11] presented the actuating performance of a one-degree-of-freedom positioning device using spring-mounted piezoelectric (PZT) actuators. An experimental set-up consisting of two spring-mounted PZT actuators was configurated to examine the actuating characteristics and verified as effective in describing the actuating behaviors through numerical examinations.…”

Inertial Piezoelectric Micro Rotary Actuator

“…In recent years, piezoelectric high-precision positioning actuators have increasingly wide applications in many areas where ultra precision positioning devices are needed, such as optoelectronics product assembly, precision micro-device manufacturing and surface atomic-scale measurements. Among all piezoelectric actuators, inertial piezoelectric actuator for precision positioning fields have attracted the attention of many researchers at home and abroad since it features simple structure, large stroke and high resolution [1][2][3][4].…”