2004
DOI: 10.1002/sia.1874
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A study of the formation of yttrium silicides epitaxially grown on Si(111)

Abstract: We present an investigation of the growth of ultrathin yttrium silicide films (YSi 2 ) epitaxially grown on n-type Si(111) as a function of the thermal treatment. Combining STM images with a quantitative spot profile LEED analysis we have studied the crystalline quality of the YSi 2−x (0 ≤ x ≤ 0.3) and we have related it to the silicide formation temperature. We have distinguished a short temperature range for the formation of the two-dimensional p(1 × 1) YSi 2 , and three growth regimes for the three-dimensio… Show more

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Cited by 5 publications
(4 citation statements)
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“…The chamber is equipped with LEED optics, CMA for Auger electron spectroscopy ͑AES͒, and an STM working at RT. The combination of these techniques allows us to study the composition of the epitaxial layers, their surface morphology, 36 and the atomic structure on the grown films. The base pressure was in the low 10 −10 mbar, raising to 2 ϫ 10 −9 mbar during the Y evaporation.…”
Section: Experimental and Theoretical Detailsmentioning
confidence: 99%
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“…The chamber is equipped with LEED optics, CMA for Auger electron spectroscopy ͑AES͒, and an STM working at RT. The combination of these techniques allows us to study the composition of the epitaxial layers, their surface morphology, 36 and the atomic structure on the grown films. The base pressure was in the low 10 −10 mbar, raising to 2 ϫ 10 −9 mbar during the Y evaporation.…”
Section: Experimental and Theoretical Detailsmentioning
confidence: 99%
“…To form the 3D silicide, solid-phase epitaxy was used. 36 The Y atoms were evaporated by electron bombardment and deposited at RT on the Si͑111͒ 7 ϫ 7 surface ͑the evaporation rate was monitored with a quartz balance͒. Samples were then annealed at 420°C for 10 minutes resulting in a silicide, characterized by a sharp ͑ ͱ 3 ϫ ͱ 3͒R30°L EED pattern.…”
Section: Experimental and Theoretical Detailsmentioning
confidence: 99%
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“…Their preparation procedure is explained elsewhere. 18 Basically, Y films deposited on Si͑111͒ were annealed at 420°C for 5 min, resulting in an epitaxially grown silicide, characterized by a sharp ͑ ͱ 3 ϫ ͱ 3͒R30 ‫ؠ‬ LEED pattern. The film thickness ranged from 5 to 10 monolayers, thus ensuring bulklike behavior for the silicide film.…”
mentioning
confidence: 99%