A Study of the Liquid Crystal Alignment Mechanism of Bond-Breaking Via Ion-Beam Irradiation of an Amorphous Aluminum-Oxide Surface

Kim, Dai-Hyun; Jung, Hee-Suk; Kang, Young-Gu; Kim, Young‐Hwan; Park, Hong Gyu; Kim, Byoung-Yong; Seo, Dae Shik

doi:10.1109/jdt.2010.2086432

Cited by 5 publications

(1 citation statement)

References 16 publications

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“…Second, the heat transfers from the laser absorbing layer to the stress adjustment layer. Finally, from the COMSOL simulation results, which are shown in figure 6(b), the temperature of the a-Al 2 O 3 layer would exceed 1200 • C. The a-Al 2 O 3 crystallizes into crystalline Al 2 O 3 when heated above 900 • C. During crystallization, the Al-O bond will become more compact, resulting in a stronger molecular interaction [18]. Macroscopically, the volume of the Al 2 O 3 layer will shrink, providing tensile stress to the wafer.…”

Section: Resultsmentioning

confidence: 99%

An effective solution to optimize the saddle-shape warpage in 3D IC applications by patterning laser treatment

Fan¹,

Xia²,

Xie³

et al. 2023

Semicond. Sci. Technol.

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The asymmetric saddle-shape warpage is one of the hardest limitations on the development of three-dimensional integrated circuits (3D ICs) as the vertical integration increases. To improve the product yield, an effective method for saddle-shape warpage reduction in 3D IC production by backside patterning laser annealing treatment with a multilayer structure is investigated in this work. The reduction of saddle–shaped warpage by patterning laser treatment is the first time in 3D NAND array wafer application and through simulations and experiments, the laser annealing pattern is determined. In addition, the materials of the multilayer structure are selected as amorphous Al2O3 and TiN according to experiments and theoretical analysis. As a result, a conformal 47.8 µm optimization of the saddle-shape warpage is successfully reached in a control wafer test by patterning laser annealing treatment.

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Section: Resultsmentioning

confidence: 99%