A study of the static characteristics of a torsional micromirror

Zhang, Xuming; Chau, Fook Siong; Quan, Chenggen; Lam, Yulin; Liu, A. Q.

doi:10.1016/s0924-4247(01)00453-8

Cited by 181 publications

(100 citation statements)

References 19 publications

Supporting

Mentioning

100

Contrasting

Order By: Relevance

“…However, in many real applications, the acquisition of an accurate analytical solution is difficult, either because the complex model geometry, or due to various non-linear effects. In these cases, a numerical solution provided by Finite Element Method (FEM) has been proved to be an effective and accurate enough alternative to strict mathematical analysis [26][27][28].…”

Section: Finite Element Methodsmentioning

confidence: 99%

Ultrasonic Transducers

2014

Ultrasonic Technology for Desiccant Regeneration

View full text Add to dashboard Cite

show abstract

Section: Finite Element Methodsmentioning

confidence: 99%

Ultrasonic Transducers

2014

Ultrasonic Technology for Desiccant Regeneration

View full text Add to dashboard Cite

show abstract

“…was studied in the past and several solutions were proposed [7][8][9][10]. Similarly, the static and dynamic characteristics of individual micro-mirrors were analysed [11][12][13][14][15]. Nevertheless, the cross-axing effect is rarely discussed.…”

Section: Introductionmentioning

confidence: 99%

MEMS optical switch: Switching time reduction

Plander

Stepanovsky

2016

Open Computer Science

View full text Add to dashboard Cite

Existing 3D MEMS-based optical switches offer good optical properties (low insertion loss, low crosstalk), high reliability and low power consumption. These switches utilize highly reflective micro-mirrors to manipulate an optical signal inside the switch directly without any conversions. They are used to build dynamically reconfigurable, highly-scalable physical optical network layer. As indicated by the simulation results of this paper, many of existing micro-mirror designs do not have their dynamic characteristics well optimized and this limits the switching speed of the optical switch. In a 3D MEMS switch, the coupling between the mechanical structure (micro-mirror) and electrostatic field (electrodes) results in dynamic coupled rotation of the micro-mirror about its axes, known as the cross-axis coupling effect. The coupling nature of micro-mirror rotation makes its control difficult. In this paper, we present the simulation case studies and a simple optimization technique leading to decoupled rotation of the micro-mirror about two perpendicular axes. This helps to reduce the switching time of the switch while keeping the same manufacturing process and only minimal design changes.

show abstract

“…In recent decades, simulation of the torsional actuators at micro-scales (without considering nano-scale effects) has been conducted by many researchers [6][7][8][9][10]. Previous investigators have applied one-degree-of-freedom (1-DOF) models to calculate the pull-in parameters of torsional actuator [9][10][11][12]. Since the vertical displacement of the movable component is usually small, these models provide reliable results in most cases.…”

Section: Introductionmentioning

confidence: 99%

Using Modified Couple Stress Theory to Investigate the Size-Dependent Instability of Rotational Nano-Actuator under Van der Waals Force

Beni

2015

A P J Eng Sci

View full text Add to dashboard Cite

While experiments reveal that the mechanical response of nano-structures is size-dependent, classic continuum theories are not able to simulate this size effect. In this paper, a non-classic continuum theory e.g. modified couple stress theory is applied for modeling the size dependent instability of torsional nano-actuator. The constitutive equation of the actuator is derived taking the effect of electrostatic and molecular forces into account. Variation of the tilt angle as a function of the applied voltage is obtained and the instability parameters i.e. instability voltage and instability angle are determined. Two actuators with different cross-sectional torsional beams are investigated as case studies. Results show that when the thickness of the torsional beam is comparable with the intrinsic material length scale, size-dependency of material characteristics can highly affect the instability parameters of the actuator. The effect of van der Waals (vdW) molecular forces on the size-dependent instability is investigated. Furthermore, the minimum gap between the mirror and the ground to ensure that the actuator does not adhere the substrate (due to molecular force) is computed. It is found that proposed model is able to predict the experimental results more accurately than the previous classic models.

show abstract

A study of the static characteristics of a torsional micromirror

Cited by 181 publications

References 19 publications

Ultrasonic Transducers

Ultrasonic Transducers

MEMS optical switch: Switching time reduction

Using Modified Couple Stress Theory to Investigate the Size-Dependent Instability of Rotational Nano-Actuator under Van der Waals Force

Contact Info

Product

Resources

About