2010
DOI: 10.1007/s00340-010-4144-1
|View full text |Cite
|
Sign up to set email alerts
|

A study of using femtosecond LIBS in analyzing metallic thin film–semiconductor interface

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
11
0

Year Published

2011
2011
2021
2021

Publication Types

Select...
9

Relationship

1
8

Authors

Journals

citations
Cited by 21 publications
(11 citation statements)
references
References 20 publications
0
11
0
Order By: Relevance
“…
radioactive, high temperature, toxic materials) [19][20][21][22][23][24][25], industry [26][27][28][29][30][31], architecture, medical (noninvasive study of human teeth and hair, diagnosis of cancer tissue, DNA analysis) [32][33][34][35][36][37], military and civil security (detection of explosive material and biological weapons) [38][39][40][41][42][43]. Most of these applications are investigated under the condition of earth's atmosphere (i.e., at 760 Torr in air atmosphere) in order to determine the selected material compositions.
…”
mentioning
confidence: 99%
“…
radioactive, high temperature, toxic materials) [19][20][21][22][23][24][25], industry [26][27][28][29][30][31], architecture, medical (noninvasive study of human teeth and hair, diagnosis of cancer tissue, DNA analysis) [32][33][34][35][36][37], military and civil security (detection of explosive material and biological weapons) [38][39][40][41][42][43]. Most of these applications are investigated under the condition of earth's atmosphere (i.e., at 760 Torr in air atmosphere) in order to determine the selected material compositions.
…”
mentioning
confidence: 99%
“…Depth profiling allowed differentiation between the dirty layer, the glaze surface, and the ceramic body. Galmed et al [38] studied Ti thin film using femtosecond LIBS. Titanium of thickness 213 nm was deposited onto a silicon substrate before and after thermal annealing.…”
Section: Depth Profiling Libs Is a Relatively Novel Techniquementioning
confidence: 99%
“…It has many practical advantages over more conventional elemental analysis techniques. LIBS has been utilized to analyze thin metal films [102] , and it has found more and more applications in monitoring of industrial processes [98] , characterization of jewellery products [103] , soil studies [104] , pulsed laser thin film deposition [105] , quality control of pharmaceutical products [100] , cleaning [106] , and in situ planetary exploration [107] .…”
Section: Laser-induced Breakdown Spectroscopy (Libs)mentioning
confidence: 99%