A study of X-ray reflectivity data analysis methods for thin film thickness determination

Brower, Daniel T.; Revay, R.; Huang, Ting

doi:10.1017/s0885715600009076

Cited by 10 publications

(7 citation statements)

References 9 publications

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“…Para cada amostra o alinhamento da superfície do depósito foi efetuado por rotação do porta-amostras em θ -2θ, entre 0,1 e 6 o (2θ) e ajuste da geometria de modo a obter o máximo de reflexão. Os parâmetros estruturais das amostras foram calculados usando-se o programa REFSIM, que ajusta a equação de refletividade 8 às curvas experimentais, pelo méto-do de mínimos quadrados. E-mail: sandrap@iq.uesp.br A qualidade óptica das amostras foi avaliada a partir de medidas de transmitância na região do UV-Vis, usando-se um espectrofotômetro HP845l Diode Harray.…”

Section: Methodsunclassified

Vidros recobertos com camadas delgadas transparentes de SnO2

Rizzato¹,

Pulcinelli²,

Santilli³

1998

Quím. Nova

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Recebido em 2/12/96; aceito em 2/6/97 GLASSES COATED WITH TRANSPARENT THIN LAYERS OF SnO 2 . SnO 2 thin layers, prepared from aqueous colloidal suspensions by the sol-gel process, have been dip-coated on commercial borosilicate glasses. The effect of the conditions of deposition on the optical and structural characteristics of the thin layers was analysed by UV-Vis spectroscopy, x-ray reflectometry and electron scanning microscopy. Layers prepared with withdrawal speed in between 0.1 and 10cm/min show thickness smaller than 90nm, roughness of the order of 2nm and transmittance higher than 80%, resulting in good optical quality samples. The roughness increases from 2 to 11nm as the withdrawal speed increases from 10 to 80cm/min, what seems to be associated to the enlargement of the layers thickness (> 90nm). The measurements of mass loss, done after etching with fluoridric acid show that the coated samples are more corrosion resistant than the uncoated borosilicate glass.Keywords: SnO 2 thin layers; corrosion resistant; coated borosilicate glass. ARTIGO INTRODUÇÃOVidros tradicionais recobertos com camadas delgadas (< l000nm) transparentes de SnO 2 apresentam maior resistência mecânica à fratura e ao desgaste abrasivo e químico. Este comportamento é explorado comercialmente na fabricação de garrafas e embalagens descartáveis mais baratas e mais leves (paredes com espessura reduzida), e com resistência à fratura equivalente às tradicionais 1 . Outra aplicação destas camadas delgadas é em utensílios de vidro empregados em restaurantes e no transporte e condicionamento de alimentos, que geralmente são submetidos a condições extremas de desgaste abrasivo e químico. Além disto, peças de vidro de elevado valor decorativo, por apresentar brilho iridiscente, são fabricadas com depósitos superficiais de SnO 2 com espessura da mesma ordem de grandeza do comprimento de onda da luz visível (400 a l000nm) 2 . Por outro lado, o dióxido de estanho é praticamente insolú-vel em pH entre 1 e l4, o que permite prever um aumento na resistência ao ataque hidrolítico dos vidros a base de borossilicato e soda cáustica recobertos com SnO 2 . Este tipo de ataque é frequente nos vidros destinados a embalagem de soluções ou suspensões farmacêuticas, limitando o período de validade destes produtos. Tradicionalmente, a resistência hidrolítica dos vidros de soda cáustica é promovida pelo tratamento de desalcalinização superficial efetuado em presença de SO 2 a aproximadamente 600 o C 3 . As camadas delgadas de SnO 2 são, usualmente, depositadas pela nebulização de solução aquosa de SnCl 4 sobre a superfí-cie do vidro aquecido entre 500 e 600 o C 1,2. Neste processo ocorre formação de vapores extremamente tóxicos e corrosivos (Cl 2 , HCl), exigindo instalações especiais para tratamento de rejeitos gasosos para evitar danos ao meio ambiente e à saúde. Este tipo de problema tem sido contornado, em parte, pela utilização de compostos organoclorados a base de estanho, que por sua vez são classificados como cancerígenos 2 . Uma rota alternativa para...

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Section: Methodsunclassified

Vidros recobertos com camadas delgadas transparentes de SnO2

Rizzato¹,

Pulcinelli²,

Santilli³

1998

Quím. Nova

View full text Add to dashboard Cite

show abstract

“…The following references, not cited in the main body of the paper, have been cited in the supporting information: Abboud et al (2011);Albouy & Valerio (1997); Als Nielsen & McMorrow (2010); Bhattacharya et al (2003);Brower et al (1996); Chihab & Naudon (1992); Daillant & Alba (2000); Daillant & Gibaud (2009) Stoev & Sakurai (1999, 2013; Tolan (1999); Vlieg (1997); Voegeli et al (2013); Wirkert et al (2013); Yasaka (2010).…”

Section: Related Literaturementioning

confidence: 99%

Fast X-ray reflectivity measurements using an X-ray pixel area detector at the DiffAbs beamline, Synchrotron SOLEIL

Mocuta

Stanescu

Gallard

et al. 2018

J Synchrotron Radiat

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This paper describes a method for rapid measurements of the specular X-ray reflectivity signal using an area detector and a monochromatic, well collimated X-ray beam (divergence below 0.01°), combined with a continuous data acquisition mode during the angular movements of the sample and detector. In addition to the total integrated (and background-corrected) reflectivity signal, this approach yields a three-dimensional mapping of the reciprocal space in the vicinity of its origin. Grazing-incidence small-angle scattering signals are recorded simultaneously. Measurements up to high momentum transfer values (close to 0.1 nm, also depending on the X-ray beam energy) can be performed in total time ranges as short as 10 s. The measurement time can be reduced by up to 100 times as compared with the classical method using monochromatic X-ray beams, a point detector and rocking scans (integrated reflectivity signal).

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“…However, for thickness information, only a difference in the index of refraction between substrate and film is necessary to reproduce the Fresnel interference phenomena at high values of k ⊥ , where the periodicity of k ⊥ oscillations approximates a Fourier transform of the film thickness. 20 Therefore, a general Fresnel reflectivity model, with the index of refraction kept as an arbitrary constant over energy spectra, may be applied to high fixed-angle, energydispersive reflectivity curves to provide approximate thickness in a fast-fitting approach applicable to inline characterization and to assaying unknown material thickness.…”

Section: Technique Backgroundmentioning

confidence: 99%

“…A modeling error estimate for thickness can be derived using another approach to deriving thickness from high-angle reflectivity data developed by Brower et al, 20 which involves directly applying a modified Fourier transform to the high-angle reflectivity information. The formula is applicable to a fixed-energy, specular reflectivity for a single thin layer with a density associated with a specific critical angle of reflection, c .…”

Section: Thickness Error Estimationmentioning

confidence: 99%

Fixed-angle, energy-dispersive x-ray reflectivity measurement of thin tantalum film thickness

Barnat

Summers

et al. 2002

Journal of Elec Materi

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In this work, we employed a fixed-angle, energy-dispersive x-ray reflectivity technique to obtain the thickness of thin tantalum films (examples Ͻ9 nm) within seconds using a conventional, low-energy x-ray copper or chromium source (20 kV/20 mA/400 W). We compared this fixed-angle, energy-dispersive result with more conventional fixed-energy (monochromatic source), angulardispersive x-ray reflectivity to establish the validity of the energy-dispersive method. This x-ray technique may be particularly useful for the metrology of growing thin-barrier layers, atomic-layer passivation, and seed-layer measurements in future microelectronics applications. Currently, thickness precision is limited by modeling assumptions and the energy discrimination available from x-ray detectors.

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A study of X-ray reflectivity data analysis methods for thin film thickness determination

Cited by 10 publications

References 9 publications

Vidros recobertos com camadas delgadas transparentes de SnO2

Vidros recobertos com camadas delgadas transparentes de SnO2

Fast X-ray reflectivity measurements using an X-ray pixel area detector at the DiffAbs beamline, Synchrotron SOLEIL

Fixed-angle, energy-dispersive x-ray reflectivity measurement of thin tantalum film thickness

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