2008
DOI: 10.1016/j.jmatprotec.2007.11.180
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A study on fabrication of silicon mold for polymer hot-embossing using focused ion beam milling

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Cited by 22 publications
(16 citation statements)
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“…[16][17][18] Therefore, these methods can offer scalable and parallel nanotexturing with controlled complexity [19] and can be applied to improve the efficiency of solar cells. [20] In addition, electron beam [21] and ion beam lithography [22] have been used to produce structures with high precision at the required scale. All these technologies, have their benefits and drawbacks, depending on the specific application.…”
Section: Doi: 101002/adma201104331mentioning
confidence: 99%
“…[16][17][18] Therefore, these methods can offer scalable and parallel nanotexturing with controlled complexity [19] and can be applied to improve the efficiency of solar cells. [20] In addition, electron beam [21] and ion beam lithography [22] have been used to produce structures with high precision at the required scale. All these technologies, have their benefits and drawbacks, depending on the specific application.…”
Section: Doi: 101002/adma201104331mentioning
confidence: 99%
“…Third, nanostructural patterns have not yet been implemented on inorganic dielectric materials in the DMD electrodes, which are only produced by physical deposition. Even though the inductively coupled plasma (ICP) etching process, laser interference lithography, electron beam, and ion beam lithography can be used to produce nanostructures on inorganic dielectric materials, many of these techniques involve harsh processing conditions, which readily cause damages to organic active materials. This is why conventional DMDs have a planar geometry structure .…”
Section: Photovoltaic Performance Of the Osc Devices With Moo3/ag Andmentioning
confidence: 99%
“…PLLA microneedles were fabricated by a hot embossing technique through a multi-step process via a PDMS replication and then heating and pressuring the PDMS mould and PLLA grains followed by unmoulding at room temperature to obtain the microneedles (Han et al 2009). A more efficient process was studied by Youn et al (2008) by fabricating silicon moulds using focused ion beam and then pressing the silicon mould in poly-methyl-methacrylate (PMMA) polymer under applied temperatures above the glass transition temperature of PMMA and pressure followed by slow cooling resulted in good reproducibility of replicated structures (Youn et al 2008). Hot embossing appears only suitable for high temperature stable drugs in a biodegradable polymer vehicle as temperatures of over 100°C are required.…”
Section: Fabrication Of Biodegradable Microneedles From Mouldsmentioning
confidence: 99%