2021
DOI: 10.1016/j.matpr.2020.10.993
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A study on improved methods in Micro-electromechanical systems technology

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Cited by 12 publications
(2 citation statements)
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“…These micro-size devices are employed for sensing and controlling, resulting in an electrical response typically on the macro scale. MEMS is recognized as one of the most promising technologies in the industry and for research purposes [587][588][589][590]. In addition to micromachining technology, recent commercial MEMS sensors have made far-reaching changes in the industry and in consumer products using silicon-based microelectronics.…”
Section: Microelectromechanical Systems (Mems)mentioning
confidence: 99%
“…These micro-size devices are employed for sensing and controlling, resulting in an electrical response typically on the macro scale. MEMS is recognized as one of the most promising technologies in the industry and for research purposes [587][588][589][590]. In addition to micromachining technology, recent commercial MEMS sensors have made far-reaching changes in the industry and in consumer products using silicon-based microelectronics.…”
Section: Microelectromechanical Systems (Mems)mentioning
confidence: 99%
“…Advancements in microelectromechanical systems (MEMS) ( 24 ), now common in modern smartphones, have led to the utilization of MEMS sensors in smartphone-based HR monitoring systems ( 25 , 26 ). Mechanocardiography (MCG), which includes gyrocardiography (GCG), seismocardiography (SCG), and ballistocardiography (BCG), measures cardiac mechanics induced by heartbeats ( 27 ).…”
Section: Introductionmentioning
confidence: 99%